4/28/2011	11:10:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/28/2011	11:10:19 AM	Recipe started at 11:10 AM
4/28/2011	11:10:19 AM	Helium valve closed
4/28/2011	11:10:19 AM	H2 valve closed
4/28/2011	11:10:19 AM	BCl3 valve closed
4/28/2011	11:10:19 AM	PH3 valve closed
4/28/2011	11:10:19 AM	SiCl4 pre valve closed
4/28/2011	11:10:19 AM	SiCl4 post valve closed
4/28/2011	11:10:19 AM	Main Vac valve closed
4/28/2011	11:10:19 AM	Bypass valve closed
4/28/2011	11:10:19 AM	Bubbler valve closed
4/28/2011	11:10:19 AM	Helium MFC set to  0.000000
4/28/2011	11:10:19 AM	H2 MFC set to  0.000000
4/28/2011	11:10:19 AM	BCl3 MFC set to  0.000000
4/28/2011	11:10:19 AM	PHl3 MFC set to  0.000000
4/28/2011	11:10:19 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:10:19 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:10:19 AM	Tube furnace set to 0
4/28/2011	11:10:19 AM	Run finished at 11:10 AM
4/28/2011	11:10:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/28/2011	11:10:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	11:10:43 AM	Recipe started at 11:10 AM
4/28/2011	11:10:44 AM	Helium valve closed
4/28/2011	11:10:44 AM	H2 valve closed
4/28/2011	11:10:44 AM	BCl3 valve closed
4/28/2011	11:10:44 AM	PH3 valve closed
4/28/2011	11:10:44 AM	SiCl4 pre valve closed
4/28/2011	11:10:44 AM	SiCl4 post valve closed
4/28/2011	11:10:44 AM	Main Vac valve closed
4/28/2011	11:10:44 AM	Bubbler valve closed
4/28/2011	11:10:44 AM	Bypass valve opened
4/28/2011	11:10:44 AM	Helium MFC set to  0.000000
4/28/2011	11:10:44 AM	H2 MFC set to  0.000000
4/28/2011	11:10:44 AM	BCl3 MFC set to  0.000000
4/28/2011	11:10:44 AM	PHl3 MFC set to  0.000000
4/28/2011	11:10:44 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:10:44 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:10:44 AM	Tube furnace set to 0
4/28/2011	11:10:44 AM	Helium valve closed
4/28/2011	11:10:44 AM	H2 valve closed
4/28/2011	11:10:44 AM	BCl3 valve closed
4/28/2011	11:10:44 AM	PH3 valve closed
4/28/2011	11:10:44 AM	SiCl4 pre valve closed
4/28/2011	11:10:44 AM	SiCl4 post valve closed
4/28/2011	11:10:44 AM	Bubbler valve closed
4/28/2011	11:10:44 AM	Main Vac valve opened
4/28/2011	11:10:44 AM	Bypass valve opened
4/28/2011	11:10:44 AM	Helium MFC set to  0.000000
4/28/2011	11:10:44 AM	H2 MFC set to  0.000000
4/28/2011	11:10:44 AM	BCl3 MFC set to  0.000000
4/28/2011	11:10:44 AM	PHl3 MFC set to  0.000000
4/28/2011	11:10:44 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:10:44 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:10:44 AM	Tube furnace set to 0
4/28/2011	11:10:44 AM	Run finished at 11:10 AM
4/28/2011	11:10:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	11:18:46 AM	Bypass valve closed
4/28/2011	11:18:46 AM	Main Vac valve closed
4/28/2011	11:18:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/28/2011	11:18:59 AM	Recipe started at 11:18 AM
4/28/2011	11:18:59 AM	H2 valve closed
4/28/2011	11:18:59 AM	BCl3 valve closed
4/28/2011	11:18:59 AM	PH3 valve closed
4/28/2011	11:18:59 AM	SiCl4 pre valve closed
4/28/2011	11:18:59 AM	SiCl4 post valve closed
4/28/2011	11:18:59 AM	Main Vac valve closed
4/28/2011	11:18:59 AM	Bypass valve closed
4/28/2011	11:18:59 AM	Bubbler valve closed
4/28/2011	11:18:59 AM	Helium valve opened
4/28/2011	11:18:59 AM	Helium MFC set to  500.000000
4/28/2011	11:18:59 AM	H2 MFC set to  0.000000
4/28/2011	11:18:59 AM	BCl3 MFC set to  0.000000
4/28/2011	11:18:59 AM	PHl3 MFC set to  0.000000
4/28/2011	11:18:59 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:18:59 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:19:00 AM	Tube furnace set to 0
4/28/2011	11:20:19 AM	Helium valve closed
4/28/2011	11:20:19 AM	H2 valve closed
4/28/2011	11:20:19 AM	BCl3 valve closed
4/28/2011	11:20:19 AM	PH3 valve closed
4/28/2011	11:20:19 AM	SiCl4 pre valve closed
4/28/2011	11:20:19 AM	SiCl4 post valve closed
4/28/2011	11:20:19 AM	Main Vac valve closed
4/28/2011	11:20:19 AM	Bypass valve closed
4/28/2011	11:20:19 AM	Bubbler valve closed
4/28/2011	11:20:19 AM	Helium MFC set to  0.000000
4/28/2011	11:20:19 AM	H2 MFC set to  0.000000
4/28/2011	11:20:19 AM	BCl3 MFC set to  0.000000
4/28/2011	11:20:19 AM	PHl3 MFC set to  0.000000
4/28/2011	11:20:19 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:20:19 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:20:19 AM	Tube furnace set to 0
4/28/2011	11:20:19 AM	Run finished at 11:20 AM
4/28/2011	11:20:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/28/2011	11:21:48 AM	Helium MFC set to  500.000000
4/28/2011	11:21:50 AM	Helium valve opened
4/28/2011	11:21:54 AM	Helium valve closed
4/28/2011	11:22:01 AM	Helium valve opened
4/28/2011	11:22:02 AM	Bubbler valve opened
4/28/2011	11:23:10 AM	Bubbler valve closed
4/28/2011	11:23:11 AM	Helium valve closed
4/28/2011	11:38:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/28/2011	11:38:38 AM	Recipe started at 11:38 AM
4/28/2011	11:38:38 AM	H2 valve closed
4/28/2011	11:38:38 AM	BCl3 valve closed
4/28/2011	11:38:38 AM	PH3 valve closed
4/28/2011	11:38:38 AM	SiCl4 pre valve closed
4/28/2011	11:38:38 AM	SiCl4 post valve closed
4/28/2011	11:38:38 AM	Main Vac valve closed
4/28/2011	11:38:38 AM	Bypass valve closed
4/28/2011	11:38:38 AM	Bubbler valve closed
4/28/2011	11:38:38 AM	Helium valve opened
4/28/2011	11:38:38 AM	Helium MFC set to  500.000000
4/28/2011	11:38:38 AM	H2 MFC set to  0.000000
4/28/2011	11:38:38 AM	BCl3 MFC set to  0.000000
4/28/2011	11:38:38 AM	PHl3 MFC set to  0.000000
4/28/2011	11:38:38 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:38:38 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:38:38 AM	Tube furnace set to 0
4/28/2011	11:38:39 AM	Helium valve closed
4/28/2011	11:38:39 AM	H2 valve closed
4/28/2011	11:38:39 AM	BCl3 valve closed
4/28/2011	11:38:39 AM	PH3 valve closed
4/28/2011	11:38:39 AM	SiCl4 pre valve closed
4/28/2011	11:38:39 AM	SiCl4 post valve closed
4/28/2011	11:38:39 AM	Main Vac valve closed
4/28/2011	11:38:39 AM	Bypass valve closed
4/28/2011	11:38:39 AM	Bubbler valve closed
4/28/2011	11:38:39 AM	Helium MFC set to  0.000000
4/28/2011	11:38:39 AM	H2 MFC set to  0.000000
4/28/2011	11:38:39 AM	BCl3 MFC set to  0.000000
4/28/2011	11:38:39 AM	PHl3 MFC set to  0.000000
4/28/2011	11:38:39 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:38:39 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:38:39 AM	Tube furnace set to 0
4/28/2011	11:38:39 AM	Run finished at 11:38 AM
4/28/2011	11:38:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/28/2011	11:48:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	11:48:40 AM	Recipe started at 11:48 AM
4/28/2011	11:48:40 AM	Helium valve closed
4/28/2011	11:48:40 AM	H2 valve closed
4/28/2011	11:48:40 AM	BCl3 valve closed
4/28/2011	11:48:40 AM	PH3 valve closed
4/28/2011	11:48:40 AM	SiCl4 pre valve closed
4/28/2011	11:48:40 AM	SiCl4 post valve closed
4/28/2011	11:48:40 AM	Main Vac valve closed
4/28/2011	11:48:40 AM	Bubbler valve closed
4/28/2011	11:48:40 AM	Bypass valve opened
4/28/2011	11:48:40 AM	Helium MFC set to  0.000000
4/28/2011	11:48:40 AM	H2 MFC set to  0.000000
4/28/2011	11:48:40 AM	BCl3 MFC set to  0.000000
4/28/2011	11:48:40 AM	PHl3 MFC set to  0.000000
4/28/2011	11:48:40 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:48:40 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:48:41 AM	Tube furnace set to 0
4/28/2011	11:49:13 AM	Helium valve closed
4/28/2011	11:49:13 AM	H2 valve closed
4/28/2011	11:49:13 AM	BCl3 valve closed
4/28/2011	11:49:13 AM	PH3 valve closed
4/28/2011	11:49:13 AM	SiCl4 pre valve closed
4/28/2011	11:49:13 AM	SiCl4 post valve closed
4/28/2011	11:49:13 AM	Bubbler valve closed
4/28/2011	11:49:13 AM	Main Vac valve opened
4/28/2011	11:49:13 AM	Bypass valve opened
4/28/2011	11:49:13 AM	Helium MFC set to  0.000000
4/28/2011	11:49:13 AM	H2 MFC set to  0.000000
4/28/2011	11:49:13 AM	BCl3 MFC set to  0.000000
4/28/2011	11:49:13 AM	PHl3 MFC set to  0.000000
4/28/2011	11:49:13 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:49:13 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:49:13 AM	Tube furnace set to 0
4/28/2011	11:49:14 AM	Run finished at 11:49 AM
4/28/2011	11:49:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	11:50:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/28/2011	11:50:10 AM	Recipe started at 11:50 AM
4/28/2011	11:50:10 AM	Helium valve closed
4/28/2011	11:50:10 AM	H2 valve closed
4/28/2011	11:50:10 AM	BCl3 valve closed
4/28/2011	11:50:10 AM	PH3 valve closed
4/28/2011	11:50:10 AM	SiCl4 pre valve closed
4/28/2011	11:50:10 AM	SiCl4 post valve closed
4/28/2011	11:50:10 AM	Main Vac valve closed
4/28/2011	11:50:10 AM	Bypass valve closed
4/28/2011	11:50:10 AM	Bubbler valve closed
4/28/2011	11:50:10 AM	Helium MFC set to  0.000000
4/28/2011	11:50:10 AM	H2 MFC set to  0.000000
4/28/2011	11:50:10 AM	BCl3 MFC set to  0.000000
4/28/2011	11:50:10 AM	PHl3 MFC set to  0.000000
4/28/2011	11:50:10 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:50:10 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:50:10 AM	Tube furnace set to 0
4/28/2011	11:50:10 AM	Run finished at 11:50 AM
4/28/2011	11:50:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/28/2011	11:50:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	11:50:21 AM	Recipe started at 11:50 AM
4/28/2011	11:50:21 AM	Helium valve closed
4/28/2011	11:50:21 AM	H2 valve closed
4/28/2011	11:50:21 AM	BCl3 valve closed
4/28/2011	11:50:21 AM	PH3 valve closed
4/28/2011	11:50:21 AM	SiCl4 pre valve closed
4/28/2011	11:50:21 AM	SiCl4 post valve closed
4/28/2011	11:50:21 AM	Main Vac valve closed
4/28/2011	11:50:21 AM	Bubbler valve closed
4/28/2011	11:50:21 AM	Bypass valve opened
4/28/2011	11:50:21 AM	Helium MFC set to  0.000000
4/28/2011	11:50:21 AM	H2 MFC set to  0.000000
4/28/2011	11:50:21 AM	BCl3 MFC set to  0.000000
4/28/2011	11:50:21 AM	PHl3 MFC set to  0.000000
4/28/2011	11:50:21 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:50:21 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:50:22 AM	Tube furnace set to 0
4/28/2011	11:50:22 AM	Helium valve closed
4/28/2011	11:50:22 AM	H2 valve closed
4/28/2011	11:50:22 AM	BCl3 valve closed
4/28/2011	11:50:22 AM	PH3 valve closed
4/28/2011	11:50:22 AM	SiCl4 pre valve closed
4/28/2011	11:50:22 AM	SiCl4 post valve closed
4/28/2011	11:50:22 AM	Bubbler valve closed
4/28/2011	11:50:22 AM	Main Vac valve opened
4/28/2011	11:50:22 AM	Bypass valve opened
4/28/2011	11:50:22 AM	Helium MFC set to  0.000000
4/28/2011	11:50:22 AM	H2 MFC set to  0.000000
4/28/2011	11:50:22 AM	BCl3 MFC set to  0.000000
4/28/2011	11:50:22 AM	PHl3 MFC set to  0.000000
4/28/2011	11:50:22 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:50:22 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:50:22 AM	Tube furnace set to 0
4/28/2011	11:50:22 AM	Run finished at 11:50 AM
4/28/2011	11:50:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	11:50:52 AM	Tube furnace set to 10
4/28/2011	11:53:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/28/2011	11:54:02 AM	Recipe started at 11:53 AM
4/28/2011	11:54:03 AM	Helium valve closed
4/28/2011	11:54:03 AM	H2 valve closed
4/28/2011	11:54:03 AM	BCl3 valve closed
4/28/2011	11:54:03 AM	PH3 valve closed
4/28/2011	11:54:03 AM	SiCl4 pre valve closed
4/28/2011	11:54:03 AM	SiCl4 post valve closed
4/28/2011	11:54:03 AM	Main Vac valve closed
4/28/2011	11:54:03 AM	Bubbler valve closed
4/28/2011	11:54:03 AM	Bypass valve opened
4/28/2011	11:54:03 AM	Helium MFC set to  0.000000
4/28/2011	11:54:03 AM	H2 MFC set to  0.000000
4/28/2011	11:54:03 AM	BCl3 MFC set to  0.000000
4/28/2011	11:54:03 AM	PHl3 MFC set to  0.000000
4/28/2011	11:54:03 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:54:03 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:54:03 AM	Tube furnace set to 0
4/28/2011	11:54:03 AM	Helium valve closed
4/28/2011	11:54:03 AM	H2 valve closed
4/28/2011	11:54:03 AM	BCl3 valve closed
4/28/2011	11:54:03 AM	PH3 valve closed
4/28/2011	11:54:03 AM	SiCl4 pre valve closed
4/28/2011	11:54:03 AM	SiCl4 post valve closed
4/28/2011	11:54:03 AM	Bubbler valve closed
4/28/2011	11:54:03 AM	Main Vac valve opened
4/28/2011	11:54:03 AM	Bypass valve opened
4/28/2011	11:54:03 AM	Helium MFC set to  0.000000
4/28/2011	11:54:03 AM	H2 MFC set to  0.000000
4/28/2011	11:54:03 AM	BCl3 MFC set to  0.000000
4/28/2011	11:54:03 AM	PHl3 MFC set to  0.000000
4/28/2011	11:54:03 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:54:03 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:54:03 AM	Tube furnace set to 0
4/28/2011	11:55:03 AM	H2 valve closed
4/28/2011	11:55:03 AM	BCl3 valve closed
4/28/2011	11:55:03 AM	PH3 valve closed
4/28/2011	11:55:03 AM	SiCl4 pre valve closed
4/28/2011	11:55:03 AM	SiCl4 post valve closed
4/28/2011	11:55:03 AM	Bubbler valve closed
4/28/2011	11:55:03 AM	Helium valve opened
4/28/2011	11:55:03 AM	Main Vac valve opened
4/28/2011	11:55:03 AM	Bypass valve opened
4/28/2011	11:55:03 AM	Helium MFC set to  100.000000
4/28/2011	11:55:03 AM	H2 MFC set to  0.000000
4/28/2011	11:55:03 AM	BCl3 MFC set to  0.000000
4/28/2011	11:55:03 AM	PHl3 MFC set to  0.000000
4/28/2011	11:55:03 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:55:03 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:55:03 AM	Tube furnace set to 0
4/28/2011	11:56:03 AM	Helium valve closed
4/28/2011	11:56:03 AM	H2 valve closed
4/28/2011	11:56:03 AM	BCl3 valve closed
4/28/2011	11:56:03 AM	PH3 valve closed
4/28/2011	11:56:03 AM	SiCl4 pre valve closed
4/28/2011	11:56:03 AM	SiCl4 post valve closed
4/28/2011	11:56:03 AM	Bubbler valve closed
4/28/2011	11:56:03 AM	Main Vac valve opened
4/28/2011	11:56:03 AM	Bypass valve opened
4/28/2011	11:56:03 AM	Helium MFC set to  0.000000
4/28/2011	11:56:03 AM	H2 MFC set to  0.000000
4/28/2011	11:56:03 AM	BCl3 MFC set to  0.000000
4/28/2011	11:56:03 AM	PHl3 MFC set to  0.000000
4/28/2011	11:56:03 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:56:03 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:56:04 AM	Tube furnace set to 0
4/28/2011	11:57:04 AM	H2 valve closed
4/28/2011	11:57:04 AM	BCl3 valve closed
4/28/2011	11:57:04 AM	PH3 valve closed
4/28/2011	11:57:04 AM	SiCl4 pre valve closed
4/28/2011	11:57:04 AM	SiCl4 post valve closed
4/28/2011	11:57:04 AM	Bubbler valve closed
4/28/2011	11:57:04 AM	Helium valve opened
4/28/2011	11:57:04 AM	Main Vac valve opened
4/28/2011	11:57:04 AM	Bypass valve opened
4/28/2011	11:57:04 AM	Helium MFC set to  100.000000
4/28/2011	11:57:04 AM	H2 MFC set to  0.000000
4/28/2011	11:57:04 AM	BCl3 MFC set to  0.000000
4/28/2011	11:57:04 AM	PHl3 MFC set to  0.000000
4/28/2011	11:57:04 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:57:04 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:57:04 AM	Tube furnace set to 0
4/28/2011	11:58:04 AM	Helium valve closed
4/28/2011	11:58:04 AM	H2 valve closed
4/28/2011	11:58:04 AM	BCl3 valve closed
4/28/2011	11:58:04 AM	PH3 valve closed
4/28/2011	11:58:04 AM	SiCl4 pre valve closed
4/28/2011	11:58:04 AM	SiCl4 post valve closed
4/28/2011	11:58:04 AM	Bubbler valve closed
4/28/2011	11:58:04 AM	Main Vac valve opened
4/28/2011	11:58:04 AM	Bypass valve opened
4/28/2011	11:58:04 AM	Helium MFC set to  0.000000
4/28/2011	11:58:04 AM	H2 MFC set to  0.000000
4/28/2011	11:58:04 AM	BCl3 MFC set to  0.000000
4/28/2011	11:58:04 AM	PHl3 MFC set to  0.000000
4/28/2011	11:58:04 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:58:04 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:58:04 AM	Tube furnace set to 0
4/28/2011	11:59:04 AM	H2 valve closed
4/28/2011	11:59:04 AM	BCl3 valve closed
4/28/2011	11:59:04 AM	PH3 valve closed
4/28/2011	11:59:04 AM	SiCl4 pre valve closed
4/28/2011	11:59:04 AM	SiCl4 post valve closed
4/28/2011	11:59:04 AM	Bubbler valve closed
4/28/2011	11:59:04 AM	Helium valve opened
4/28/2011	11:59:04 AM	Main Vac valve opened
4/28/2011	11:59:04 AM	Bypass valve opened
4/28/2011	11:59:04 AM	Helium MFC set to  100.000000
4/28/2011	11:59:04 AM	H2 MFC set to  0.000000
4/28/2011	11:59:04 AM	BCl3 MFC set to  0.000000
4/28/2011	11:59:04 AM	PHl3 MFC set to  0.000000
4/28/2011	11:59:04 AM	SiCl4 MFC set to  0.000000
4/28/2011	11:59:04 AM	Bypass solenoid MFC set to  0.000000
4/28/2011	11:59:04 AM	Tube furnace set to 0
4/28/2011	12:00:04 PM	Helium valve closed
4/28/2011	12:00:04 PM	H2 valve closed
4/28/2011	12:00:04 PM	BCl3 valve closed
4/28/2011	12:00:04 PM	PH3 valve closed
4/28/2011	12:00:04 PM	SiCl4 pre valve closed
4/28/2011	12:00:04 PM	SiCl4 post valve closed
4/28/2011	12:00:04 PM	Bubbler valve closed
4/28/2011	12:00:04 PM	Main Vac valve opened
4/28/2011	12:00:04 PM	Bypass valve opened
4/28/2011	12:00:04 PM	Helium MFC set to  0.000000
4/28/2011	12:00:04 PM	H2 MFC set to  0.000000
4/28/2011	12:00:04 PM	BCl3 MFC set to  0.000000
4/28/2011	12:00:04 PM	PHl3 MFC set to  0.000000
4/28/2011	12:00:04 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:00:04 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:00:04 PM	Tube furnace set to 0
4/28/2011	12:01:04 PM	H2 valve closed
4/28/2011	12:01:04 PM	BCl3 valve closed
4/28/2011	12:01:04 PM	PH3 valve closed
4/28/2011	12:01:04 PM	SiCl4 pre valve closed
4/28/2011	12:01:04 PM	SiCl4 post valve closed
4/28/2011	12:01:04 PM	Bubbler valve closed
4/28/2011	12:01:04 PM	Helium valve opened
4/28/2011	12:01:04 PM	Main Vac valve opened
4/28/2011	12:01:04 PM	Bypass valve opened
4/28/2011	12:01:04 PM	Helium MFC set to  100.000000
4/28/2011	12:01:04 PM	H2 MFC set to  0.000000
4/28/2011	12:01:04 PM	BCl3 MFC set to  0.000000
4/28/2011	12:01:04 PM	PHl3 MFC set to  0.000000
4/28/2011	12:01:04 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:01:04 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:01:05 PM	Tube furnace set to 0
4/28/2011	12:02:05 PM	Helium valve closed
4/28/2011	12:02:05 PM	H2 valve closed
4/28/2011	12:02:05 PM	BCl3 valve closed
4/28/2011	12:02:05 PM	PH3 valve closed
4/28/2011	12:02:05 PM	SiCl4 pre valve closed
4/28/2011	12:02:05 PM	SiCl4 post valve closed
4/28/2011	12:02:05 PM	Bubbler valve closed
4/28/2011	12:02:05 PM	Main Vac valve opened
4/28/2011	12:02:05 PM	Bypass valve opened
4/28/2011	12:02:05 PM	Helium MFC set to  0.000000
4/28/2011	12:02:05 PM	H2 MFC set to  0.000000
4/28/2011	12:02:05 PM	BCl3 MFC set to  0.000000
4/28/2011	12:02:05 PM	PHl3 MFC set to  0.000000
4/28/2011	12:02:05 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:02:05 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:02:05 PM	Tube furnace set to 0
4/28/2011	12:03:05 PM	H2 valve closed
4/28/2011	12:03:05 PM	BCl3 valve closed
4/28/2011	12:03:05 PM	PH3 valve closed
4/28/2011	12:03:05 PM	SiCl4 pre valve closed
4/28/2011	12:03:05 PM	SiCl4 post valve closed
4/28/2011	12:03:05 PM	Bubbler valve closed
4/28/2011	12:03:05 PM	Helium valve opened
4/28/2011	12:03:05 PM	Main Vac valve opened
4/28/2011	12:03:05 PM	Bypass valve opened
4/28/2011	12:03:05 PM	Helium MFC set to  100.000000
4/28/2011	12:03:05 PM	H2 MFC set to  0.000000
4/28/2011	12:03:05 PM	BCl3 MFC set to  0.000000
4/28/2011	12:03:05 PM	PHl3 MFC set to  0.000000
4/28/2011	12:03:05 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:03:05 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:03:05 PM	Tube furnace set to 0
4/28/2011	12:04:05 PM	Helium valve closed
4/28/2011	12:04:05 PM	H2 valve closed
4/28/2011	12:04:05 PM	BCl3 valve closed
4/28/2011	12:04:05 PM	PH3 valve closed
4/28/2011	12:04:05 PM	SiCl4 pre valve closed
4/28/2011	12:04:05 PM	SiCl4 post valve closed
4/28/2011	12:04:05 PM	Bubbler valve closed
4/28/2011	12:04:05 PM	Main Vac valve opened
4/28/2011	12:04:05 PM	Bypass valve opened
4/28/2011	12:04:05 PM	Helium MFC set to  0.000000
4/28/2011	12:04:05 PM	H2 MFC set to  0.000000
4/28/2011	12:04:05 PM	BCl3 MFC set to  0.000000
4/28/2011	12:04:05 PM	PHl3 MFC set to  0.000000
4/28/2011	12:04:05 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:04:05 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:04:05 PM	Tube furnace set to 0
4/28/2011	12:05:05 PM	H2 valve closed
4/28/2011	12:05:05 PM	BCl3 valve closed
4/28/2011	12:05:05 PM	PH3 valve closed
4/28/2011	12:05:05 PM	SiCl4 pre valve closed
4/28/2011	12:05:05 PM	SiCl4 post valve closed
4/28/2011	12:05:05 PM	Bubbler valve closed
4/28/2011	12:05:05 PM	Helium valve opened
4/28/2011	12:05:05 PM	Main Vac valve opened
4/28/2011	12:05:05 PM	Bypass valve opened
4/28/2011	12:05:05 PM	Helium MFC set to  100.000000
4/28/2011	12:05:05 PM	H2 MFC set to  0.000000
4/28/2011	12:05:05 PM	BCl3 MFC set to  0.000000
4/28/2011	12:05:05 PM	PHl3 MFC set to  0.000000
4/28/2011	12:05:05 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:05:05 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:05:05 PM	Tube furnace set to 0
4/28/2011	12:06:05 PM	Helium valve closed
4/28/2011	12:06:05 PM	H2 valve closed
4/28/2011	12:06:05 PM	BCl3 valve closed
4/28/2011	12:06:05 PM	PH3 valve closed
4/28/2011	12:06:05 PM	SiCl4 pre valve closed
4/28/2011	12:06:05 PM	SiCl4 post valve closed
4/28/2011	12:06:05 PM	Bubbler valve closed
4/28/2011	12:06:05 PM	Main Vac valve opened
4/28/2011	12:06:05 PM	Bypass valve opened
4/28/2011	12:06:05 PM	Helium MFC set to  0.000000
4/28/2011	12:06:05 PM	H2 MFC set to  0.000000
4/28/2011	12:06:05 PM	BCl3 MFC set to  0.000000
4/28/2011	12:06:05 PM	PHl3 MFC set to  0.000000
4/28/2011	12:06:05 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:06:05 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:06:06 PM	Tube furnace set to 0
4/28/2011	12:07:06 PM	H2 valve closed
4/28/2011	12:07:06 PM	BCl3 valve closed
4/28/2011	12:07:06 PM	PH3 valve closed
4/28/2011	12:07:06 PM	SiCl4 pre valve closed
4/28/2011	12:07:06 PM	SiCl4 post valve closed
4/28/2011	12:07:06 PM	Bubbler valve closed
4/28/2011	12:07:06 PM	Helium valve opened
4/28/2011	12:07:06 PM	Main Vac valve opened
4/28/2011	12:07:06 PM	Bypass valve opened
4/28/2011	12:07:06 PM	Helium MFC set to  100.000000
4/28/2011	12:07:06 PM	H2 MFC set to  0.000000
4/28/2011	12:07:06 PM	BCl3 MFC set to  0.000000
4/28/2011	12:07:06 PM	PHl3 MFC set to  0.000000
4/28/2011	12:07:06 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:07:06 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:07:06 PM	Tube furnace set to 0
4/28/2011	12:08:06 PM	Helium valve closed
4/28/2011	12:08:06 PM	H2 valve closed
4/28/2011	12:08:06 PM	BCl3 valve closed
4/28/2011	12:08:06 PM	PH3 valve closed
4/28/2011	12:08:06 PM	SiCl4 pre valve closed
4/28/2011	12:08:06 PM	SiCl4 post valve closed
4/28/2011	12:08:06 PM	Bubbler valve closed
4/28/2011	12:08:06 PM	Main Vac valve opened
4/28/2011	12:08:06 PM	Bypass valve opened
4/28/2011	12:08:06 PM	Helium MFC set to  0.000000
4/28/2011	12:08:06 PM	H2 MFC set to  0.000000
4/28/2011	12:08:06 PM	BCl3 MFC set to  0.000000
4/28/2011	12:08:06 PM	PHl3 MFC set to  0.000000
4/28/2011	12:08:06 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:08:06 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:08:06 PM	Tube furnace set to 0
4/28/2011	12:09:06 PM	H2 valve closed
4/28/2011	12:09:06 PM	BCl3 valve closed
4/28/2011	12:09:06 PM	PH3 valve closed
4/28/2011	12:09:06 PM	SiCl4 pre valve closed
4/28/2011	12:09:06 PM	SiCl4 post valve closed
4/28/2011	12:09:06 PM	Bubbler valve closed
4/28/2011	12:09:06 PM	Helium valve opened
4/28/2011	12:09:06 PM	Main Vac valve opened
4/28/2011	12:09:06 PM	Bypass valve opened
4/28/2011	12:09:06 PM	Helium MFC set to  100.000000
4/28/2011	12:09:06 PM	H2 MFC set to  0.000000
4/28/2011	12:09:06 PM	BCl3 MFC set to  0.000000
4/28/2011	12:09:06 PM	PHl3 MFC set to  0.000000
4/28/2011	12:09:06 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:09:06 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:09:06 PM	Tube furnace set to 0
4/28/2011	12:10:06 PM	Helium valve closed
4/28/2011	12:10:06 PM	H2 valve closed
4/28/2011	12:10:06 PM	BCl3 valve closed
4/28/2011	12:10:06 PM	PH3 valve closed
4/28/2011	12:10:06 PM	SiCl4 pre valve closed
4/28/2011	12:10:06 PM	SiCl4 post valve closed
4/28/2011	12:10:06 PM	Bubbler valve closed
4/28/2011	12:10:06 PM	Main Vac valve opened
4/28/2011	12:10:06 PM	Bypass valve opened
4/28/2011	12:10:06 PM	Helium MFC set to  0.000000
4/28/2011	12:10:06 PM	H2 MFC set to  0.000000
4/28/2011	12:10:06 PM	BCl3 MFC set to  0.000000
4/28/2011	12:10:06 PM	PHl3 MFC set to  0.000000
4/28/2011	12:10:06 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:10:06 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:10:06 PM	Tube furnace set to 0
4/28/2011	12:11:06 PM	H2 valve closed
4/28/2011	12:11:06 PM	BCl3 valve closed
4/28/2011	12:11:06 PM	PH3 valve closed
4/28/2011	12:11:06 PM	SiCl4 pre valve closed
4/28/2011	12:11:06 PM	SiCl4 post valve closed
4/28/2011	12:11:06 PM	Bubbler valve closed
4/28/2011	12:11:06 PM	Helium valve opened
4/28/2011	12:11:06 PM	Main Vac valve opened
4/28/2011	12:11:06 PM	Bypass valve opened
4/28/2011	12:11:06 PM	Helium MFC set to  100.000000
4/28/2011	12:11:06 PM	H2 MFC set to  0.000000
4/28/2011	12:11:06 PM	BCl3 MFC set to  0.000000
4/28/2011	12:11:06 PM	PHl3 MFC set to  0.000000
4/28/2011	12:11:06 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:11:06 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:11:06 PM	Tube furnace set to 0
4/28/2011	12:12:07 PM	Helium valve closed
4/28/2011	12:12:07 PM	H2 valve closed
4/28/2011	12:12:07 PM	BCl3 valve closed
4/28/2011	12:12:07 PM	PH3 valve closed
4/28/2011	12:12:07 PM	SiCl4 pre valve closed
4/28/2011	12:12:07 PM	SiCl4 post valve closed
4/28/2011	12:12:07 PM	Bubbler valve closed
4/28/2011	12:12:07 PM	Main Vac valve opened
4/28/2011	12:12:07 PM	Bypass valve opened
4/28/2011	12:12:07 PM	Helium MFC set to  0.000000
4/28/2011	12:12:07 PM	H2 MFC set to  0.000000
4/28/2011	12:12:07 PM	BCl3 MFC set to  0.000000
4/28/2011	12:12:07 PM	PHl3 MFC set to  0.000000
4/28/2011	12:12:07 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:12:07 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:12:07 PM	Tube furnace set to 0
4/28/2011	12:13:07 PM	H2 valve closed
4/28/2011	12:13:07 PM	BCl3 valve closed
4/28/2011	12:13:07 PM	PH3 valve closed
4/28/2011	12:13:07 PM	SiCl4 pre valve closed
4/28/2011	12:13:07 PM	SiCl4 post valve closed
4/28/2011	12:13:07 PM	Bubbler valve closed
4/28/2011	12:13:07 PM	Helium valve opened
4/28/2011	12:13:07 PM	Main Vac valve opened
4/28/2011	12:13:07 PM	Bypass valve opened
4/28/2011	12:13:07 PM	Helium MFC set to  100.000000
4/28/2011	12:13:07 PM	H2 MFC set to  0.000000
4/28/2011	12:13:07 PM	BCl3 MFC set to  0.000000
4/28/2011	12:13:07 PM	PHl3 MFC set to  0.000000
4/28/2011	12:13:07 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:13:07 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:13:07 PM	Tube furnace set to 0
4/28/2011	12:14:07 PM	Helium valve closed
4/28/2011	12:14:07 PM	H2 valve closed
4/28/2011	12:14:07 PM	BCl3 valve closed
4/28/2011	12:14:07 PM	PH3 valve closed
4/28/2011	12:14:07 PM	SiCl4 pre valve closed
4/28/2011	12:14:07 PM	SiCl4 post valve closed
4/28/2011	12:14:07 PM	Bubbler valve closed
4/28/2011	12:14:07 PM	Main Vac valve opened
4/28/2011	12:14:07 PM	Bypass valve opened
4/28/2011	12:14:07 PM	Helium MFC set to  0.000000
4/28/2011	12:14:07 PM	H2 MFC set to  0.000000
4/28/2011	12:14:07 PM	BCl3 MFC set to  0.000000
4/28/2011	12:14:07 PM	PHl3 MFC set to  0.000000
4/28/2011	12:14:07 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:14:07 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:14:07 PM	Tube furnace set to 0
4/28/2011	12:14:08 PM	Run finished at 12:14 PM
4/28/2011	12:14:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/28/2011	12:50:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/28/2011	12:50:27 PM	Recipe started at 12:50 PM
4/28/2011	12:50:27 PM	Helium valve closed
4/28/2011	12:50:27 PM	H2 valve closed
4/28/2011	12:50:27 PM	BCl3 valve closed
4/28/2011	12:50:27 PM	PH3 valve closed
4/28/2011	12:50:27 PM	SiCl4 pre valve closed
4/28/2011	12:50:27 PM	SiCl4 post valve closed
4/28/2011	12:50:27 PM	Main Vac valve closed
4/28/2011	12:50:27 PM	Bubbler valve closed
4/28/2011	12:50:27 PM	Bypass valve opened
4/28/2011	12:50:27 PM	Helium MFC set to  0.000000
4/28/2011	12:50:27 PM	H2 MFC set to  0.000000
4/28/2011	12:50:27 PM	BCl3 MFC set to  0.000000
4/28/2011	12:50:27 PM	PHl3 MFC set to  0.000000
4/28/2011	12:50:27 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:50:27 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:50:27 PM	Tube furnace set to 0
4/28/2011	12:50:28 PM	Helium valve closed
4/28/2011	12:50:28 PM	H2 valve closed
4/28/2011	12:50:28 PM	BCl3 valve closed
4/28/2011	12:50:28 PM	PH3 valve closed
4/28/2011	12:50:28 PM	SiCl4 pre valve closed
4/28/2011	12:50:28 PM	SiCl4 post valve closed
4/28/2011	12:50:28 PM	Bubbler valve closed
4/28/2011	12:50:28 PM	Main Vac valve opened
4/28/2011	12:50:28 PM	Bypass valve opened
4/28/2011	12:50:28 PM	Helium MFC set to  0.000000
4/28/2011	12:50:28 PM	H2 MFC set to  0.000000
4/28/2011	12:50:28 PM	BCl3 MFC set to  0.000000
4/28/2011	12:50:28 PM	PHl3 MFC set to  0.000000
4/28/2011	12:50:28 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:50:28 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:50:28 PM	Tube furnace set to 0
4/28/2011	12:51:28 PM	H2 valve closed
4/28/2011	12:51:28 PM	BCl3 valve closed
4/28/2011	12:51:28 PM	PH3 valve closed
4/28/2011	12:51:28 PM	SiCl4 pre valve closed
4/28/2011	12:51:28 PM	SiCl4 post valve closed
4/28/2011	12:51:28 PM	Bubbler valve closed
4/28/2011	12:51:28 PM	Helium valve opened
4/28/2011	12:51:28 PM	Main Vac valve opened
4/28/2011	12:51:28 PM	Bypass valve opened
4/28/2011	12:51:28 PM	Helium MFC set to  100.000000
4/28/2011	12:51:28 PM	H2 MFC set to  0.000000
4/28/2011	12:51:28 PM	BCl3 MFC set to  0.000000
4/28/2011	12:51:28 PM	PHl3 MFC set to  0.000000
4/28/2011	12:51:28 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:51:28 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:51:28 PM	Tube furnace set to 0
4/28/2011	12:52:28 PM	Helium valve closed
4/28/2011	12:52:28 PM	H2 valve closed
4/28/2011	12:52:28 PM	BCl3 valve closed
4/28/2011	12:52:28 PM	PH3 valve closed
4/28/2011	12:52:28 PM	SiCl4 pre valve closed
4/28/2011	12:52:28 PM	SiCl4 post valve closed
4/28/2011	12:52:28 PM	Bubbler valve closed
4/28/2011	12:52:28 PM	Main Vac valve opened
4/28/2011	12:52:28 PM	Bypass valve opened
4/28/2011	12:52:28 PM	Helium MFC set to  0.000000
4/28/2011	12:52:28 PM	H2 MFC set to  0.000000
4/28/2011	12:52:28 PM	BCl3 MFC set to  0.000000
4/28/2011	12:52:28 PM	PHl3 MFC set to  0.000000
4/28/2011	12:52:28 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:52:28 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:52:28 PM	Tube furnace set to 0
4/28/2011	12:53:28 PM	H2 valve closed
4/28/2011	12:53:28 PM	BCl3 valve closed
4/28/2011	12:53:28 PM	PH3 valve closed
4/28/2011	12:53:28 PM	SiCl4 pre valve closed
4/28/2011	12:53:28 PM	SiCl4 post valve closed
4/28/2011	12:53:28 PM	Bubbler valve closed
4/28/2011	12:53:28 PM	Helium valve opened
4/28/2011	12:53:28 PM	Main Vac valve opened
4/28/2011	12:53:28 PM	Bypass valve opened
4/28/2011	12:53:28 PM	Helium MFC set to  100.000000
4/28/2011	12:53:28 PM	H2 MFC set to  0.000000
4/28/2011	12:53:28 PM	BCl3 MFC set to  0.000000
4/28/2011	12:53:28 PM	PHl3 MFC set to  0.000000
4/28/2011	12:53:28 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:53:28 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:53:28 PM	Tube furnace set to 0
4/28/2011	12:54:28 PM	Helium valve closed
4/28/2011	12:54:28 PM	H2 valve closed
4/28/2011	12:54:28 PM	BCl3 valve closed
4/28/2011	12:54:28 PM	PH3 valve closed
4/28/2011	12:54:28 PM	SiCl4 pre valve closed
4/28/2011	12:54:28 PM	SiCl4 post valve closed
4/28/2011	12:54:28 PM	Bubbler valve closed
4/28/2011	12:54:28 PM	Main Vac valve opened
4/28/2011	12:54:28 PM	Bypass valve opened
4/28/2011	12:54:28 PM	Helium MFC set to  0.000000
4/28/2011	12:54:28 PM	H2 MFC set to  0.000000
4/28/2011	12:54:28 PM	BCl3 MFC set to  0.000000
4/28/2011	12:54:28 PM	PHl3 MFC set to  0.000000
4/28/2011	12:54:28 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:54:28 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:54:28 PM	Tube furnace set to 0
4/28/2011	12:55:28 PM	H2 valve closed
4/28/2011	12:55:28 PM	BCl3 valve closed
4/28/2011	12:55:28 PM	PH3 valve closed
4/28/2011	12:55:28 PM	SiCl4 pre valve closed
4/28/2011	12:55:28 PM	SiCl4 post valve closed
4/28/2011	12:55:28 PM	Bubbler valve closed
4/28/2011	12:55:28 PM	Helium valve opened
4/28/2011	12:55:29 PM	Main Vac valve opened
4/28/2011	12:55:29 PM	Bypass valve opened
4/28/2011	12:55:29 PM	Helium MFC set to  100.000000
4/28/2011	12:55:29 PM	H2 MFC set to  0.000000
4/28/2011	12:55:29 PM	BCl3 MFC set to  0.000000
4/28/2011	12:55:29 PM	PHl3 MFC set to  0.000000
4/28/2011	12:55:29 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:55:29 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:55:29 PM	Tube furnace set to 0
4/28/2011	12:56:29 PM	Helium valve closed
4/28/2011	12:56:29 PM	H2 valve closed
4/28/2011	12:56:29 PM	BCl3 valve closed
4/28/2011	12:56:29 PM	PH3 valve closed
4/28/2011	12:56:29 PM	SiCl4 pre valve closed
4/28/2011	12:56:29 PM	SiCl4 post valve closed
4/28/2011	12:56:29 PM	Bubbler valve closed
4/28/2011	12:56:29 PM	Main Vac valve opened
4/28/2011	12:56:29 PM	Bypass valve opened
4/28/2011	12:56:29 PM	Helium MFC set to  0.000000
4/28/2011	12:56:29 PM	H2 MFC set to  0.000000
4/28/2011	12:56:29 PM	BCl3 MFC set to  0.000000
4/28/2011	12:56:29 PM	PHl3 MFC set to  0.000000
4/28/2011	12:56:29 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:56:29 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:56:29 PM	Tube furnace set to 0
4/28/2011	12:57:29 PM	H2 valve closed
4/28/2011	12:57:29 PM	BCl3 valve closed
4/28/2011	12:57:29 PM	PH3 valve closed
4/28/2011	12:57:29 PM	SiCl4 pre valve closed
4/28/2011	12:57:29 PM	SiCl4 post valve closed
4/28/2011	12:57:29 PM	Bubbler valve closed
4/28/2011	12:57:29 PM	Helium valve opened
4/28/2011	12:57:29 PM	Main Vac valve opened
4/28/2011	12:57:29 PM	Bypass valve opened
4/28/2011	12:57:29 PM	Helium MFC set to  100.000000
4/28/2011	12:57:29 PM	H2 MFC set to  0.000000
4/28/2011	12:57:29 PM	BCl3 MFC set to  0.000000
4/28/2011	12:57:29 PM	PHl3 MFC set to  0.000000
4/28/2011	12:57:29 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:57:29 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:57:29 PM	Tube furnace set to 0
4/28/2011	12:58:29 PM	Helium valve closed
4/28/2011	12:58:29 PM	H2 valve closed
4/28/2011	12:58:29 PM	BCl3 valve closed
4/28/2011	12:58:29 PM	PH3 valve closed
4/28/2011	12:58:29 PM	SiCl4 pre valve closed
4/28/2011	12:58:29 PM	SiCl4 post valve closed
4/28/2011	12:58:29 PM	Bubbler valve closed
4/28/2011	12:58:29 PM	Main Vac valve opened
4/28/2011	12:58:29 PM	Bypass valve opened
4/28/2011	12:58:29 PM	Helium MFC set to  0.000000
4/28/2011	12:58:29 PM	H2 MFC set to  0.000000
4/28/2011	12:58:29 PM	BCl3 MFC set to  0.000000
4/28/2011	12:58:29 PM	PHl3 MFC set to  0.000000
4/28/2011	12:58:29 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:58:29 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:58:29 PM	Tube furnace set to 0
4/28/2011	12:59:29 PM	H2 valve closed
4/28/2011	12:59:29 PM	BCl3 valve closed
4/28/2011	12:59:29 PM	PH3 valve closed
4/28/2011	12:59:29 PM	SiCl4 pre valve closed
4/28/2011	12:59:29 PM	SiCl4 post valve closed
4/28/2011	12:59:29 PM	Bubbler valve closed
4/28/2011	12:59:29 PM	Helium valve opened
4/28/2011	12:59:29 PM	Main Vac valve opened
4/28/2011	12:59:29 PM	Bypass valve opened
4/28/2011	12:59:29 PM	Helium MFC set to  100.000000
4/28/2011	12:59:29 PM	H2 MFC set to  0.000000
4/28/2011	12:59:29 PM	BCl3 MFC set to  0.000000
4/28/2011	12:59:29 PM	PHl3 MFC set to  0.000000
4/28/2011	12:59:29 PM	SiCl4 MFC set to  0.000000
4/28/2011	12:59:29 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	12:59:29 PM	Tube furnace set to 0
4/28/2011	1:00:29 PM	Helium valve closed
4/28/2011	1:00:29 PM	H2 valve closed
4/28/2011	1:00:29 PM	BCl3 valve closed
4/28/2011	1:00:29 PM	PH3 valve closed
4/28/2011	1:00:29 PM	SiCl4 pre valve closed
4/28/2011	1:00:29 PM	SiCl4 post valve closed
4/28/2011	1:00:29 PM	Bubbler valve closed
4/28/2011	1:00:29 PM	Main Vac valve opened
4/28/2011	1:00:29 PM	Bypass valve opened
4/28/2011	1:00:29 PM	Helium MFC set to  0.000000
4/28/2011	1:00:29 PM	H2 MFC set to  0.000000
4/28/2011	1:00:30 PM	BCl3 MFC set to  0.000000
4/28/2011	1:00:30 PM	PHl3 MFC set to  0.000000
4/28/2011	1:00:30 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:00:30 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:00:30 PM	Tube furnace set to 0
4/28/2011	1:01:30 PM	H2 valve closed
4/28/2011	1:01:30 PM	BCl3 valve closed
4/28/2011	1:01:30 PM	PH3 valve closed
4/28/2011	1:01:30 PM	SiCl4 pre valve closed
4/28/2011	1:01:30 PM	SiCl4 post valve closed
4/28/2011	1:01:30 PM	Bubbler valve closed
4/28/2011	1:01:30 PM	Helium valve opened
4/28/2011	1:01:30 PM	Main Vac valve opened
4/28/2011	1:01:30 PM	Bypass valve opened
4/28/2011	1:01:30 PM	Helium MFC set to  100.000000
4/28/2011	1:01:30 PM	H2 MFC set to  0.000000
4/28/2011	1:01:30 PM	BCl3 MFC set to  0.000000
4/28/2011	1:01:30 PM	PHl3 MFC set to  0.000000
4/28/2011	1:01:30 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:01:30 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:01:30 PM	Tube furnace set to 0
4/28/2011	1:02:30 PM	Helium valve closed
4/28/2011	1:02:30 PM	H2 valve closed
4/28/2011	1:02:30 PM	BCl3 valve closed
4/28/2011	1:02:30 PM	PH3 valve closed
4/28/2011	1:02:30 PM	SiCl4 pre valve closed
4/28/2011	1:02:30 PM	SiCl4 post valve closed
4/28/2011	1:02:30 PM	Bubbler valve closed
4/28/2011	1:02:30 PM	Main Vac valve opened
4/28/2011	1:02:30 PM	Bypass valve opened
4/28/2011	1:02:30 PM	Helium MFC set to  0.000000
4/28/2011	1:02:30 PM	H2 MFC set to  0.000000
4/28/2011	1:02:30 PM	BCl3 MFC set to  0.000000
4/28/2011	1:02:30 PM	PHl3 MFC set to  0.000000
4/28/2011	1:02:30 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:02:30 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:02:30 PM	Tube furnace set to 0
4/28/2011	1:03:30 PM	H2 valve closed
4/28/2011	1:03:30 PM	BCl3 valve closed
4/28/2011	1:03:30 PM	PH3 valve closed
4/28/2011	1:03:30 PM	SiCl4 pre valve closed
4/28/2011	1:03:30 PM	SiCl4 post valve closed
4/28/2011	1:03:30 PM	Bubbler valve closed
4/28/2011	1:03:30 PM	Helium valve opened
4/28/2011	1:03:30 PM	Main Vac valve opened
4/28/2011	1:03:30 PM	Bypass valve opened
4/28/2011	1:03:30 PM	Helium MFC set to  100.000000
4/28/2011	1:03:30 PM	H2 MFC set to  0.000000
4/28/2011	1:03:30 PM	BCl3 MFC set to  0.000000
4/28/2011	1:03:30 PM	PHl3 MFC set to  0.000000
4/28/2011	1:03:30 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:03:30 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:03:30 PM	Tube furnace set to 0
4/28/2011	1:04:30 PM	Helium valve closed
4/28/2011	1:04:30 PM	H2 valve closed
4/28/2011	1:04:30 PM	BCl3 valve closed
4/28/2011	1:04:30 PM	PH3 valve closed
4/28/2011	1:04:30 PM	SiCl4 pre valve closed
4/28/2011	1:04:30 PM	SiCl4 post valve closed
4/28/2011	1:04:30 PM	Bubbler valve closed
4/28/2011	1:04:30 PM	Main Vac valve opened
4/28/2011	1:04:30 PM	Bypass valve opened
4/28/2011	1:04:30 PM	Helium MFC set to  0.000000
4/28/2011	1:04:30 PM	H2 MFC set to  0.000000
4/28/2011	1:04:30 PM	BCl3 MFC set to  0.000000
4/28/2011	1:04:30 PM	PHl3 MFC set to  0.000000
4/28/2011	1:04:30 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:04:30 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:04:30 PM	Tube furnace set to 0
4/28/2011	1:05:30 PM	H2 valve closed
4/28/2011	1:05:30 PM	BCl3 valve closed
4/28/2011	1:05:30 PM	PH3 valve closed
4/28/2011	1:05:30 PM	SiCl4 pre valve closed
4/28/2011	1:05:31 PM	SiCl4 post valve closed
4/28/2011	1:05:31 PM	Bubbler valve closed
4/28/2011	1:05:31 PM	Helium valve opened
4/28/2011	1:05:31 PM	Main Vac valve opened
4/28/2011	1:05:31 PM	Bypass valve opened
4/28/2011	1:05:31 PM	Helium MFC set to  100.000000
4/28/2011	1:05:31 PM	H2 MFC set to  0.000000
4/28/2011	1:05:31 PM	BCl3 MFC set to  0.000000
4/28/2011	1:05:31 PM	PHl3 MFC set to  0.000000
4/28/2011	1:05:31 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:05:31 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:05:31 PM	Tube furnace set to 0
4/28/2011	1:06:31 PM	Helium valve closed
4/28/2011	1:06:31 PM	H2 valve closed
4/28/2011	1:06:31 PM	BCl3 valve closed
4/28/2011	1:06:31 PM	PH3 valve closed
4/28/2011	1:06:31 PM	SiCl4 pre valve closed
4/28/2011	1:06:31 PM	SiCl4 post valve closed
4/28/2011	1:06:31 PM	Bubbler valve closed
4/28/2011	1:06:31 PM	Main Vac valve opened
4/28/2011	1:06:31 PM	Bypass valve opened
4/28/2011	1:06:31 PM	Helium MFC set to  0.000000
4/28/2011	1:06:31 PM	H2 MFC set to  0.000000
4/28/2011	1:06:31 PM	BCl3 MFC set to  0.000000
4/28/2011	1:06:31 PM	PHl3 MFC set to  0.000000
4/28/2011	1:06:31 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:06:31 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:06:31 PM	Tube furnace set to 0
4/28/2011	1:07:31 PM	H2 valve closed
4/28/2011	1:07:31 PM	BCl3 valve closed
4/28/2011	1:07:31 PM	PH3 valve closed
4/28/2011	1:07:31 PM	SiCl4 pre valve closed
4/28/2011	1:07:31 PM	SiCl4 post valve closed
4/28/2011	1:07:31 PM	Bubbler valve closed
4/28/2011	1:07:31 PM	Helium valve opened
4/28/2011	1:07:31 PM	Main Vac valve opened
4/28/2011	1:07:31 PM	Bypass valve opened
4/28/2011	1:07:31 PM	Helium MFC set to  100.000000
4/28/2011	1:07:31 PM	H2 MFC set to  0.000000
4/28/2011	1:07:31 PM	BCl3 MFC set to  0.000000
4/28/2011	1:07:31 PM	PHl3 MFC set to  0.000000
4/28/2011	1:07:31 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:07:31 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:07:31 PM	Tube furnace set to 0
4/28/2011	1:08:31 PM	Helium valve closed
4/28/2011	1:08:31 PM	H2 valve closed
4/28/2011	1:08:31 PM	BCl3 valve closed
4/28/2011	1:08:31 PM	PH3 valve closed
4/28/2011	1:08:31 PM	SiCl4 pre valve closed
4/28/2011	1:08:31 PM	SiCl4 post valve closed
4/28/2011	1:08:31 PM	Bubbler valve closed
4/28/2011	1:08:31 PM	Main Vac valve opened
4/28/2011	1:08:31 PM	Bypass valve opened
4/28/2011	1:08:31 PM	Helium MFC set to  0.000000
4/28/2011	1:08:31 PM	H2 MFC set to  0.000000
4/28/2011	1:08:31 PM	BCl3 MFC set to  0.000000
4/28/2011	1:08:31 PM	PHl3 MFC set to  0.000000
4/28/2011	1:08:31 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:08:31 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:08:31 PM	Tube furnace set to 0
4/28/2011	1:09:31 PM	H2 valve closed
4/28/2011	1:09:31 PM	BCl3 valve closed
4/28/2011	1:09:31 PM	PH3 valve closed
4/28/2011	1:09:31 PM	SiCl4 pre valve closed
4/28/2011	1:09:31 PM	SiCl4 post valve closed
4/28/2011	1:09:31 PM	Bubbler valve closed
4/28/2011	1:09:31 PM	Helium valve opened
4/28/2011	1:09:31 PM	Main Vac valve opened
4/28/2011	1:09:31 PM	Bypass valve opened
4/28/2011	1:09:31 PM	Helium MFC set to  100.000000
4/28/2011	1:09:31 PM	H2 MFC set to  0.000000
4/28/2011	1:09:31 PM	BCl3 MFC set to  0.000000
4/28/2011	1:09:31 PM	PHl3 MFC set to  0.000000
4/28/2011	1:09:31 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:09:31 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:09:31 PM	Tube furnace set to 0
4/28/2011	1:10:31 PM	Helium valve closed
4/28/2011	1:10:31 PM	H2 valve closed
4/28/2011	1:10:31 PM	BCl3 valve closed
4/28/2011	1:10:31 PM	PH3 valve closed
4/28/2011	1:10:31 PM	SiCl4 pre valve closed
4/28/2011	1:10:31 PM	SiCl4 post valve closed
4/28/2011	1:10:31 PM	Bubbler valve closed
4/28/2011	1:10:31 PM	Main Vac valve opened
4/28/2011	1:10:31 PM	Bypass valve opened
4/28/2011	1:10:32 PM	Helium MFC set to  0.000000
4/28/2011	1:10:32 PM	H2 MFC set to  0.000000
4/28/2011	1:10:32 PM	BCl3 MFC set to  0.000000
4/28/2011	1:10:32 PM	PHl3 MFC set to  0.000000
4/28/2011	1:10:32 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:10:32 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:10:32 PM	Tube furnace set to 0
4/28/2011	1:10:33 PM	Run finished at 1:10 PM
4/28/2011	1:10:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/28/2011	1:14:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/28/2011	1:14:13 PM	Recipe started at 1:14 PM
4/28/2011	1:14:13 PM	Helium valve closed
4/28/2011	1:14:13 PM	H2 valve closed
4/28/2011	1:14:13 PM	BCl3 valve closed
4/28/2011	1:14:13 PM	PH3 valve closed
4/28/2011	1:14:13 PM	SiCl4 pre valve closed
4/28/2011	1:14:13 PM	SiCl4 post valve closed
4/28/2011	1:14:13 PM	Main Vac valve closed
4/28/2011	1:14:13 PM	Bypass valve closed
4/28/2011	1:14:13 PM	Bubbler valve closed
4/28/2011	1:14:13 PM	Helium MFC set to  0.000000
4/28/2011	1:14:13 PM	H2 MFC set to  0.000000
4/28/2011	1:14:13 PM	BCl3 MFC set to  0.000000
4/28/2011	1:14:13 PM	PHl3 MFC set to  0.000000
4/28/2011	1:14:13 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:14:13 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:14:13 PM	Tube furnace set to 0
4/28/2011	1:14:13 PM	Run finished at 1:14 PM
4/28/2011	1:14:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/28/2011	1:14:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	1:14:32 PM	Recipe started at 1:14 PM
4/28/2011	1:14:32 PM	Helium valve closed
4/28/2011	1:14:32 PM	H2 valve closed
4/28/2011	1:14:32 PM	BCl3 valve closed
4/28/2011	1:14:32 PM	PH3 valve closed
4/28/2011	1:14:32 PM	SiCl4 pre valve closed
4/28/2011	1:14:32 PM	SiCl4 post valve closed
4/28/2011	1:14:32 PM	Main Vac valve closed
4/28/2011	1:14:32 PM	Bubbler valve closed
4/28/2011	1:14:32 PM	Bypass valve opened
4/28/2011	1:14:32 PM	Helium MFC set to  0.000000
4/28/2011	1:14:32 PM	H2 MFC set to  0.000000
4/28/2011	1:14:32 PM	BCl3 MFC set to  0.000000
4/28/2011	1:14:32 PM	PHl3 MFC set to  0.000000
4/28/2011	1:14:32 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:14:32 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:14:32 PM	Tube furnace set to 0
4/28/2011	1:14:33 PM	Helium valve closed
4/28/2011	1:14:33 PM	H2 valve closed
4/28/2011	1:14:33 PM	BCl3 valve closed
4/28/2011	1:14:33 PM	PH3 valve closed
4/28/2011	1:14:33 PM	SiCl4 pre valve closed
4/28/2011	1:14:33 PM	SiCl4 post valve closed
4/28/2011	1:14:33 PM	Bubbler valve closed
4/28/2011	1:14:33 PM	Main Vac valve opened
4/28/2011	1:14:33 PM	Bypass valve opened
4/28/2011	1:14:33 PM	Helium MFC set to  0.000000
4/28/2011	1:14:33 PM	H2 MFC set to  0.000000
4/28/2011	1:14:33 PM	BCl3 MFC set to  0.000000
4/28/2011	1:14:33 PM	PHl3 MFC set to  0.000000
4/28/2011	1:14:33 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:14:33 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:14:33 PM	Tube furnace set to 0
4/28/2011	1:14:33 PM	Run finished at 1:14 PM
4/28/2011	1:14:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	1:17:16 PM	Recipe started at 1:17 PM
4/28/2011	1:17:16 PM	Helium valve closed
4/28/2011	1:17:16 PM	BCl3 valve closed
4/28/2011	1:17:16 PM	PH3 valve closed
4/28/2011	1:17:16 PM	SiCl4 pre valve closed
4/28/2011	1:17:16 PM	SiCl4 post valve closed
4/28/2011	1:17:16 PM	Main Vac valve closed
4/28/2011	1:17:16 PM	Bypass valve closed
4/28/2011	1:17:16 PM	Bubbler valve closed
4/28/2011	1:17:16 PM	H2 valve opened
4/28/2011	1:17:16 PM	Helium MFC set to  0.000000
4/28/2011	1:17:16 PM	H2 MFC set to  500.000000
4/28/2011	1:17:16 PM	BCl3 MFC set to  0.000000
4/28/2011	1:17:16 PM	PHl3 MFC set to  0.000000
4/28/2011	1:17:16 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:17:16 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:17:16 PM	Tube furnace set to 100
4/28/2011	1:18:39 PM	Helium valve closed
4/28/2011	1:18:39 PM	BCl3 valve closed
4/28/2011	1:18:39 PM	PH3 valve closed
4/28/2011	1:18:39 PM	SiCl4 pre valve closed
4/28/2011	1:18:39 PM	SiCl4 post valve closed
4/28/2011	1:18:39 PM	Main Vac valve closed
4/28/2011	1:18:39 PM	Bypass valve closed
4/28/2011	1:18:39 PM	H2 valve opened
4/28/2011	1:18:39 PM	Bubbler valve opened
4/28/2011	1:18:39 PM	Helium MFC set to  0.000000
4/28/2011	1:18:39 PM	H2 MFC set to  500.000000
4/28/2011	1:18:39 PM	BCl3 MFC set to  0.000000
4/28/2011	1:18:39 PM	PHl3 MFC set to  0.000000
4/28/2011	1:18:39 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:18:39 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:18:39 PM	Tube furnace set to 1000
4/28/2011	1:38:39 PM	Helium valve closed
4/28/2011	1:38:39 PM	PH3 valve closed
4/28/2011	1:38:39 PM	Main Vac valve closed
4/28/2011	1:38:39 PM	Bypass valve closed
4/28/2011	1:38:39 PM	H2 valve opened
4/28/2011	1:38:39 PM	BCl3 valve opened
4/28/2011	1:38:39 PM	SiCl4 pre valve opened
4/28/2011	1:38:39 PM	SiCl4 post valve opened
4/28/2011	1:38:39 PM	Bubbler valve opened
4/28/2011	1:38:39 PM	Helium MFC set to  0.000000
4/28/2011	1:38:39 PM	H2 MFC set to  500.000000
4/28/2011	1:38:39 PM	BCl3 MFC set to  3.000000
4/28/2011	1:38:39 PM	PHl3 MFC set to  0.000000
4/28/2011	1:38:39 PM	SiCl4 MFC set to  50.000000
4/28/2011	1:38:39 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:38:39 PM	Tube furnace set to 1000
4/28/2011	1:55:19 PM	H2 valve closed
4/28/2011	1:55:19 PM	BCl3 valve closed
4/28/2011	1:55:19 PM	PH3 valve closed
4/28/2011	1:55:19 PM	SiCl4 pre valve closed
4/28/2011	1:55:19 PM	SiCl4 post valve closed
4/28/2011	1:55:19 PM	Main Vac valve closed
4/28/2011	1:55:19 PM	Bypass valve closed
4/28/2011	1:55:19 PM	Helium valve opened
4/28/2011	1:55:19 PM	Bubbler valve opened
4/28/2011	1:55:19 PM	Helium MFC set to  500.000000
4/28/2011	1:55:19 PM	H2 MFC set to  0.000000
4/28/2011	1:55:19 PM	BCl3 MFC set to  0.000000
4/28/2011	1:55:19 PM	PHl3 MFC set to  0.000000
4/28/2011	1:55:19 PM	SiCl4 MFC set to  0.000000
4/28/2011	1:55:19 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	1:55:19 PM	Tube furnace set to 0
4/28/2011	2:15:19 PM	Helium valve closed
4/28/2011	2:15:19 PM	H2 valve closed
4/28/2011	2:15:19 PM	BCl3 valve closed
4/28/2011	2:15:19 PM	PH3 valve closed
4/28/2011	2:15:19 PM	SiCl4 pre valve closed
4/28/2011	2:15:19 PM	SiCl4 post valve closed
4/28/2011	2:15:19 PM	Main Vac valve closed
4/28/2011	2:15:19 PM	Bypass valve closed
4/28/2011	2:15:19 PM	Bubbler valve closed
4/28/2011	2:15:19 PM	Helium MFC set to  0.000000
4/28/2011	2:15:19 PM	H2 MFC set to  0.000000
4/28/2011	2:15:19 PM	BCl3 MFC set to  0.000000
4/28/2011	2:15:19 PM	PHl3 MFC set to  0.000000
4/28/2011	2:15:19 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:15:19 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:15:19 PM	Tube furnace set to 0
4/28/2011	2:15:19 PM	Run finished at 2:15 PM
4/28/2011	2:23:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/28/2011	2:23:07 PM	Recipe started at 2:23 PM
4/28/2011	2:23:07 PM	H2 valve closed
4/28/2011	2:23:07 PM	BCl3 valve closed
4/28/2011	2:23:07 PM	PH3 valve closed
4/28/2011	2:23:07 PM	SiCl4 pre valve closed
4/28/2011	2:23:07 PM	SiCl4 post valve closed
4/28/2011	2:23:07 PM	Main Vac valve closed
4/28/2011	2:23:07 PM	Bypass valve closed
4/28/2011	2:23:07 PM	Bubbler valve closed
4/28/2011	2:23:07 PM	Helium valve opened
4/28/2011	2:23:07 PM	Helium MFC set to  500.000000
4/28/2011	2:23:07 PM	H2 MFC set to  0.000000
4/28/2011	2:23:07 PM	BCl3 MFC set to  0.000000
4/28/2011	2:23:07 PM	PHl3 MFC set to  0.000000
4/28/2011	2:23:07 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:23:07 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:23:07 PM	Tube furnace set to 0
4/28/2011	2:23:09 PM	Helium valve closed
4/28/2011	2:23:09 PM	H2 valve closed
4/28/2011	2:23:09 PM	BCl3 valve closed
4/28/2011	2:23:09 PM	PH3 valve closed
4/28/2011	2:23:09 PM	SiCl4 pre valve closed
4/28/2011	2:23:09 PM	SiCl4 post valve closed
4/28/2011	2:23:09 PM	Main Vac valve closed
4/28/2011	2:23:09 PM	Bypass valve closed
4/28/2011	2:23:09 PM	Bubbler valve closed
4/28/2011	2:23:09 PM	Helium MFC set to  0.000000
4/28/2011	2:23:09 PM	H2 MFC set to  0.000000
4/28/2011	2:23:09 PM	BCl3 MFC set to  0.000000
4/28/2011	2:23:09 PM	PHl3 MFC set to  0.000000
4/28/2011	2:23:09 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:23:09 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:23:10 PM	Tube furnace set to 0
4/28/2011	2:23:10 PM	Run finished at 2:23 PM
4/28/2011	2:23:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/28/2011	2:25:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/28/2011	2:25:20 PM	Recipe started at 2:25 PM
4/28/2011	2:25:20 PM	H2 valve closed
4/28/2011	2:25:20 PM	BCl3 valve closed
4/28/2011	2:25:20 PM	PH3 valve closed
4/28/2011	2:25:20 PM	SiCl4 pre valve closed
4/28/2011	2:25:20 PM	SiCl4 post valve closed
4/28/2011	2:25:20 PM	Main Vac valve closed
4/28/2011	2:25:20 PM	Bypass valve closed
4/28/2011	2:25:20 PM	Bubbler valve closed
4/28/2011	2:25:20 PM	Helium valve opened
4/28/2011	2:25:20 PM	Helium MFC set to  500.000000
4/28/2011	2:25:20 PM	H2 MFC set to  0.000000
4/28/2011	2:25:20 PM	BCl3 MFC set to  0.000000
4/28/2011	2:25:20 PM	PHl3 MFC set to  0.000000
4/28/2011	2:25:20 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:25:20 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:25:20 PM	Tube furnace set to 0
4/28/2011	2:25:22 PM	Helium valve closed
4/28/2011	2:25:22 PM	H2 valve closed
4/28/2011	2:25:22 PM	BCl3 valve closed
4/28/2011	2:25:22 PM	PH3 valve closed
4/28/2011	2:25:22 PM	SiCl4 pre valve closed
4/28/2011	2:25:22 PM	SiCl4 post valve closed
4/28/2011	2:25:22 PM	Main Vac valve closed
4/28/2011	2:25:22 PM	Bypass valve closed
4/28/2011	2:25:22 PM	Bubbler valve closed
4/28/2011	2:25:22 PM	Helium MFC set to  0.000000
4/28/2011	2:25:22 PM	H2 MFC set to  0.000000
4/28/2011	2:25:22 PM	BCl3 MFC set to  0.000000
4/28/2011	2:25:22 PM	PHl3 MFC set to  0.000000
4/28/2011	2:25:22 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:25:22 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:25:22 PM	Tube furnace set to 0
4/28/2011	2:25:22 PM	Run finished at 2:25 PM
4/28/2011	2:25:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/28/2011	2:31:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	2:31:56 PM	Recipe started at 2:31 PM
4/28/2011	2:31:56 PM	Helium valve closed
4/28/2011	2:31:56 PM	H2 valve closed
4/28/2011	2:31:56 PM	BCl3 valve closed
4/28/2011	2:31:56 PM	PH3 valve closed
4/28/2011	2:31:56 PM	SiCl4 pre valve closed
4/28/2011	2:31:56 PM	SiCl4 post valve closed
4/28/2011	2:31:56 PM	Main Vac valve closed
4/28/2011	2:31:56 PM	Bubbler valve closed
4/28/2011	2:31:56 PM	Bypass valve opened
4/28/2011	2:31:56 PM	Helium MFC set to  0.000000
4/28/2011	2:31:56 PM	H2 MFC set to  0.000000
4/28/2011	2:31:56 PM	BCl3 MFC set to  0.000000
4/28/2011	2:31:56 PM	PHl3 MFC set to  0.000000
4/28/2011	2:31:56 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:31:56 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:31:56 PM	Tube furnace set to 0
4/28/2011	2:32:28 PM	Helium valve closed
4/28/2011	2:32:28 PM	H2 valve closed
4/28/2011	2:32:28 PM	BCl3 valve closed
4/28/2011	2:32:28 PM	PH3 valve closed
4/28/2011	2:32:28 PM	SiCl4 pre valve closed
4/28/2011	2:32:28 PM	SiCl4 post valve closed
4/28/2011	2:32:28 PM	Bubbler valve closed
4/28/2011	2:32:28 PM	Main Vac valve opened
4/28/2011	2:32:28 PM	Bypass valve opened
4/28/2011	2:32:28 PM	Helium MFC set to  0.000000
4/28/2011	2:32:28 PM	H2 MFC set to  0.000000
4/28/2011	2:32:28 PM	BCl3 MFC set to  0.000000
4/28/2011	2:32:28 PM	PHl3 MFC set to  0.000000
4/28/2011	2:32:28 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:32:28 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:32:29 PM	Tube furnace set to 0
4/28/2011	2:32:29 PM	Run finished at 2:32 PM
4/28/2011	2:32:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	2:33:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/28/2011	2:33:53 PM	Recipe started at 2:33 PM
4/28/2011	2:33:53 PM	Helium valve closed
4/28/2011	2:33:53 PM	H2 valve closed
4/28/2011	2:33:53 PM	BCl3 valve closed
4/28/2011	2:33:53 PM	PH3 valve closed
4/28/2011	2:33:53 PM	SiCl4 pre valve closed
4/28/2011	2:33:53 PM	SiCl4 post valve closed
4/28/2011	2:33:53 PM	Main Vac valve closed
4/28/2011	2:33:53 PM	Bubbler valve closed
4/28/2011	2:33:53 PM	Bypass valve opened
4/28/2011	2:33:53 PM	Helium MFC set to  0.000000
4/28/2011	2:33:53 PM	H2 MFC set to  0.000000
4/28/2011	2:33:53 PM	BCl3 MFC set to  0.000000
4/28/2011	2:33:53 PM	PHl3 MFC set to  0.000000
4/28/2011	2:33:53 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:33:53 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:33:54 PM	Tube furnace set to 0
4/28/2011	2:33:54 PM	Helium valve closed
4/28/2011	2:33:54 PM	H2 valve closed
4/28/2011	2:33:54 PM	BCl3 valve closed
4/28/2011	2:33:54 PM	PH3 valve closed
4/28/2011	2:33:54 PM	SiCl4 pre valve closed
4/28/2011	2:33:54 PM	SiCl4 post valve closed
4/28/2011	2:33:54 PM	Bubbler valve closed
4/28/2011	2:33:54 PM	Main Vac valve opened
4/28/2011	2:33:54 PM	Bypass valve opened
4/28/2011	2:33:54 PM	Helium MFC set to  0.000000
4/28/2011	2:33:54 PM	H2 MFC set to  0.000000
4/28/2011	2:33:54 PM	BCl3 MFC set to  0.000000
4/28/2011	2:33:54 PM	PHl3 MFC set to  0.000000
4/28/2011	2:33:54 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:33:54 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:33:54 PM	Tube furnace set to 0
4/28/2011	2:34:54 PM	H2 valve closed
4/28/2011	2:34:54 PM	BCl3 valve closed
4/28/2011	2:34:54 PM	PH3 valve closed
4/28/2011	2:34:54 PM	SiCl4 pre valve closed
4/28/2011	2:34:54 PM	SiCl4 post valve closed
4/28/2011	2:34:54 PM	Bubbler valve closed
4/28/2011	2:34:54 PM	Helium valve opened
4/28/2011	2:34:54 PM	Main Vac valve opened
4/28/2011	2:34:54 PM	Bypass valve opened
4/28/2011	2:34:54 PM	Helium MFC set to  100.000000
4/28/2011	2:34:54 PM	H2 MFC set to  0.000000
4/28/2011	2:34:54 PM	BCl3 MFC set to  0.000000
4/28/2011	2:34:54 PM	PHl3 MFC set to  0.000000
4/28/2011	2:34:54 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:34:54 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:34:54 PM	Tube furnace set to 0
4/28/2011	2:35:54 PM	Helium valve closed
4/28/2011	2:35:54 PM	H2 valve closed
4/28/2011	2:35:54 PM	BCl3 valve closed
4/28/2011	2:35:54 PM	PH3 valve closed
4/28/2011	2:35:54 PM	SiCl4 pre valve closed
4/28/2011	2:35:54 PM	SiCl4 post valve closed
4/28/2011	2:35:54 PM	Bubbler valve closed
4/28/2011	2:35:54 PM	Main Vac valve opened
4/28/2011	2:35:54 PM	Bypass valve opened
4/28/2011	2:35:54 PM	Helium MFC set to  0.000000
4/28/2011	2:35:54 PM	H2 MFC set to  0.000000
4/28/2011	2:35:54 PM	BCl3 MFC set to  0.000000
4/28/2011	2:35:54 PM	PHl3 MFC set to  0.000000
4/28/2011	2:35:54 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:35:54 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:35:54 PM	Tube furnace set to 0
4/28/2011	2:36:54 PM	H2 valve closed
4/28/2011	2:36:54 PM	BCl3 valve closed
4/28/2011	2:36:54 PM	PH3 valve closed
4/28/2011	2:36:54 PM	SiCl4 pre valve closed
4/28/2011	2:36:54 PM	SiCl4 post valve closed
4/28/2011	2:36:54 PM	Bubbler valve closed
4/28/2011	2:36:55 PM	Helium valve opened
4/28/2011	2:36:55 PM	Main Vac valve opened
4/28/2011	2:36:55 PM	Bypass valve opened
4/28/2011	2:36:55 PM	Helium MFC set to  100.000000
4/28/2011	2:36:55 PM	H2 MFC set to  0.000000
4/28/2011	2:36:55 PM	BCl3 MFC set to  0.000000
4/28/2011	2:36:55 PM	PHl3 MFC set to  0.000000
4/28/2011	2:36:55 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:36:55 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:36:55 PM	Tube furnace set to 0
4/28/2011	2:37:55 PM	Helium valve closed
4/28/2011	2:37:55 PM	H2 valve closed
4/28/2011	2:37:55 PM	BCl3 valve closed
4/28/2011	2:37:55 PM	PH3 valve closed
4/28/2011	2:37:55 PM	SiCl4 pre valve closed
4/28/2011	2:37:55 PM	SiCl4 post valve closed
4/28/2011	2:37:55 PM	Bubbler valve closed
4/28/2011	2:37:55 PM	Main Vac valve opened
4/28/2011	2:37:55 PM	Bypass valve opened
4/28/2011	2:37:55 PM	Helium MFC set to  0.000000
4/28/2011	2:37:55 PM	H2 MFC set to  0.000000
4/28/2011	2:37:55 PM	BCl3 MFC set to  0.000000
4/28/2011	2:37:55 PM	PHl3 MFC set to  0.000000
4/28/2011	2:37:55 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:37:55 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:37:55 PM	Tube furnace set to 0
4/28/2011	2:38:55 PM	H2 valve closed
4/28/2011	2:38:55 PM	BCl3 valve closed
4/28/2011	2:38:55 PM	PH3 valve closed
4/28/2011	2:38:55 PM	SiCl4 pre valve closed
4/28/2011	2:38:55 PM	SiCl4 post valve closed
4/28/2011	2:38:55 PM	Bubbler valve closed
4/28/2011	2:38:55 PM	Helium valve opened
4/28/2011	2:38:55 PM	Main Vac valve opened
4/28/2011	2:38:55 PM	Bypass valve opened
4/28/2011	2:38:55 PM	Helium MFC set to  100.000000
4/28/2011	2:38:55 PM	H2 MFC set to  0.000000
4/28/2011	2:38:55 PM	BCl3 MFC set to  0.000000
4/28/2011	2:38:55 PM	PHl3 MFC set to  0.000000
4/28/2011	2:38:55 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:38:55 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:38:55 PM	Tube furnace set to 0
4/28/2011	2:39:55 PM	Helium valve closed
4/28/2011	2:39:55 PM	H2 valve closed
4/28/2011	2:39:55 PM	BCl3 valve closed
4/28/2011	2:39:55 PM	PH3 valve closed
4/28/2011	2:39:55 PM	SiCl4 pre valve closed
4/28/2011	2:39:55 PM	SiCl4 post valve closed
4/28/2011	2:39:55 PM	Bubbler valve closed
4/28/2011	2:39:55 PM	Main Vac valve opened
4/28/2011	2:39:55 PM	Bypass valve opened
4/28/2011	2:39:55 PM	Helium MFC set to  0.000000
4/28/2011	2:39:55 PM	H2 MFC set to  0.000000
4/28/2011	2:39:55 PM	BCl3 MFC set to  0.000000
4/28/2011	2:39:55 PM	PHl3 MFC set to  0.000000
4/28/2011	2:39:55 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:39:55 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:39:55 PM	Tube furnace set to 0
4/28/2011	2:40:55 PM	H2 valve closed
4/28/2011	2:40:55 PM	BCl3 valve closed
4/28/2011	2:40:55 PM	PH3 valve closed
4/28/2011	2:40:55 PM	SiCl4 pre valve closed
4/28/2011	2:40:55 PM	SiCl4 post valve closed
4/28/2011	2:40:55 PM	Bubbler valve closed
4/28/2011	2:40:55 PM	Helium valve opened
4/28/2011	2:40:55 PM	Main Vac valve opened
4/28/2011	2:40:55 PM	Bypass valve opened
4/28/2011	2:40:55 PM	Helium MFC set to  100.000000
4/28/2011	2:40:55 PM	H2 MFC set to  0.000000
4/28/2011	2:40:55 PM	BCl3 MFC set to  0.000000
4/28/2011	2:40:55 PM	PHl3 MFC set to  0.000000
4/28/2011	2:40:55 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:40:55 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:40:55 PM	Tube furnace set to 0
4/28/2011	2:41:55 PM	Helium valve closed
4/28/2011	2:41:55 PM	H2 valve closed
4/28/2011	2:41:55 PM	BCl3 valve closed
4/28/2011	2:41:55 PM	PH3 valve closed
4/28/2011	2:41:55 PM	SiCl4 pre valve closed
4/28/2011	2:41:55 PM	SiCl4 post valve closed
4/28/2011	2:41:55 PM	Bubbler valve closed
4/28/2011	2:41:55 PM	Main Vac valve opened
4/28/2011	2:41:55 PM	Bypass valve opened
4/28/2011	2:41:55 PM	Helium MFC set to  0.000000
4/28/2011	2:41:55 PM	H2 MFC set to  0.000000
4/28/2011	2:41:55 PM	BCl3 MFC set to  0.000000
4/28/2011	2:41:56 PM	PHl3 MFC set to  0.000000
4/28/2011	2:41:56 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:41:56 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:41:56 PM	Tube furnace set to 0
4/28/2011	2:42:56 PM	H2 valve closed
4/28/2011	2:42:56 PM	BCl3 valve closed
4/28/2011	2:42:56 PM	PH3 valve closed
4/28/2011	2:42:56 PM	SiCl4 pre valve closed
4/28/2011	2:42:56 PM	SiCl4 post valve closed
4/28/2011	2:42:56 PM	Bubbler valve closed
4/28/2011	2:42:56 PM	Helium valve opened
4/28/2011	2:42:56 PM	Main Vac valve opened
4/28/2011	2:42:56 PM	Bypass valve opened
4/28/2011	2:42:56 PM	Helium MFC set to  100.000000
4/28/2011	2:42:56 PM	H2 MFC set to  0.000000
4/28/2011	2:42:56 PM	BCl3 MFC set to  0.000000
4/28/2011	2:42:56 PM	PHl3 MFC set to  0.000000
4/28/2011	2:42:56 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:42:56 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:42:56 PM	Tube furnace set to 0
4/28/2011	2:43:56 PM	Helium valve closed
4/28/2011	2:43:56 PM	H2 valve closed
4/28/2011	2:43:56 PM	BCl3 valve closed
4/28/2011	2:43:56 PM	PH3 valve closed
4/28/2011	2:43:56 PM	SiCl4 pre valve closed
4/28/2011	2:43:56 PM	SiCl4 post valve closed
4/28/2011	2:43:56 PM	Bubbler valve closed
4/28/2011	2:43:56 PM	Main Vac valve opened
4/28/2011	2:43:56 PM	Bypass valve opened
4/28/2011	2:43:56 PM	Helium MFC set to  0.000000
4/28/2011	2:43:56 PM	H2 MFC set to  0.000000
4/28/2011	2:43:56 PM	BCl3 MFC set to  0.000000
4/28/2011	2:43:56 PM	PHl3 MFC set to  0.000000
4/28/2011	2:43:56 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:43:56 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:43:56 PM	Tube furnace set to 0
4/28/2011	2:44:56 PM	H2 valve closed
4/28/2011	2:44:56 PM	BCl3 valve closed
4/28/2011	2:44:56 PM	PH3 valve closed
4/28/2011	2:44:56 PM	SiCl4 pre valve closed
4/28/2011	2:44:56 PM	SiCl4 post valve closed
4/28/2011	2:44:56 PM	Bubbler valve closed
4/28/2011	2:44:56 PM	Helium valve opened
4/28/2011	2:44:56 PM	Main Vac valve opened
4/28/2011	2:44:56 PM	Bypass valve opened
4/28/2011	2:44:56 PM	Helium MFC set to  100.000000
4/28/2011	2:44:56 PM	H2 MFC set to  0.000000
4/28/2011	2:44:56 PM	BCl3 MFC set to  0.000000
4/28/2011	2:44:56 PM	PHl3 MFC set to  0.000000
4/28/2011	2:44:56 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:44:56 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:44:56 PM	Tube furnace set to 0
4/28/2011	2:45:56 PM	Helium valve closed
4/28/2011	2:45:56 PM	H2 valve closed
4/28/2011	2:45:56 PM	BCl3 valve closed
4/28/2011	2:45:56 PM	PH3 valve closed
4/28/2011	2:45:56 PM	SiCl4 pre valve closed
4/28/2011	2:45:56 PM	SiCl4 post valve closed
4/28/2011	2:45:56 PM	Bubbler valve closed
4/28/2011	2:45:56 PM	Main Vac valve opened
4/28/2011	2:45:56 PM	Bypass valve opened
4/28/2011	2:45:56 PM	Helium MFC set to  0.000000
4/28/2011	2:45:56 PM	H2 MFC set to  0.000000
4/28/2011	2:45:56 PM	BCl3 MFC set to  0.000000
4/28/2011	2:45:56 PM	PHl3 MFC set to  0.000000
4/28/2011	2:45:56 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:45:56 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:45:56 PM	Tube furnace set to 0
4/28/2011	2:46:56 PM	H2 valve closed
4/28/2011	2:46:56 PM	BCl3 valve closed
4/28/2011	2:46:56 PM	PH3 valve closed
4/28/2011	2:46:56 PM	SiCl4 pre valve closed
4/28/2011	2:46:56 PM	SiCl4 post valve closed
4/28/2011	2:46:56 PM	Bubbler valve closed
4/28/2011	2:46:56 PM	Helium valve opened
4/28/2011	2:46:56 PM	Main Vac valve opened
4/28/2011	2:46:56 PM	Bypass valve opened
4/28/2011	2:46:56 PM	Helium MFC set to  100.000000
4/28/2011	2:46:56 PM	H2 MFC set to  0.000000
4/28/2011	2:46:56 PM	BCl3 MFC set to  0.000000
4/28/2011	2:46:56 PM	PHl3 MFC set to  0.000000
4/28/2011	2:46:56 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:46:56 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:46:57 PM	Tube furnace set to 0
4/28/2011	2:47:57 PM	Helium valve closed
4/28/2011	2:47:57 PM	H2 valve closed
4/28/2011	2:47:57 PM	BCl3 valve closed
4/28/2011	2:47:57 PM	PH3 valve closed
4/28/2011	2:47:57 PM	SiCl4 pre valve closed
4/28/2011	2:47:57 PM	SiCl4 post valve closed
4/28/2011	2:47:57 PM	Bubbler valve closed
4/28/2011	2:47:57 PM	Main Vac valve opened
4/28/2011	2:47:57 PM	Bypass valve opened
4/28/2011	2:47:57 PM	Helium MFC set to  0.000000
4/28/2011	2:47:57 PM	H2 MFC set to  0.000000
4/28/2011	2:47:57 PM	BCl3 MFC set to  0.000000
4/28/2011	2:47:57 PM	PHl3 MFC set to  0.000000
4/28/2011	2:47:57 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:47:57 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:47:57 PM	Tube furnace set to 0
4/28/2011	2:48:57 PM	H2 valve closed
4/28/2011	2:48:57 PM	BCl3 valve closed
4/28/2011	2:48:57 PM	PH3 valve closed
4/28/2011	2:48:57 PM	SiCl4 pre valve closed
4/28/2011	2:48:57 PM	SiCl4 post valve closed
4/28/2011	2:48:57 PM	Bubbler valve closed
4/28/2011	2:48:57 PM	Helium valve opened
4/28/2011	2:48:57 PM	Main Vac valve opened
4/28/2011	2:48:57 PM	Bypass valve opened
4/28/2011	2:48:57 PM	Helium MFC set to  100.000000
4/28/2011	2:48:57 PM	H2 MFC set to  0.000000
4/28/2011	2:48:57 PM	BCl3 MFC set to  0.000000
4/28/2011	2:48:57 PM	PHl3 MFC set to  0.000000
4/28/2011	2:48:57 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:48:57 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:48:57 PM	Tube furnace set to 0
4/28/2011	2:49:57 PM	Helium valve closed
4/28/2011	2:49:57 PM	H2 valve closed
4/28/2011	2:49:57 PM	BCl3 valve closed
4/28/2011	2:49:57 PM	PH3 valve closed
4/28/2011	2:49:57 PM	SiCl4 pre valve closed
4/28/2011	2:49:57 PM	SiCl4 post valve closed
4/28/2011	2:49:57 PM	Bubbler valve closed
4/28/2011	2:49:57 PM	Main Vac valve opened
4/28/2011	2:49:57 PM	Bypass valve opened
4/28/2011	2:49:57 PM	Helium MFC set to  0.000000
4/28/2011	2:49:57 PM	H2 MFC set to  0.000000
4/28/2011	2:49:57 PM	BCl3 MFC set to  0.000000
4/28/2011	2:49:57 PM	PHl3 MFC set to  0.000000
4/28/2011	2:49:57 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:49:57 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:49:57 PM	Tube furnace set to 0
4/28/2011	2:50:57 PM	H2 valve closed
4/28/2011	2:50:57 PM	BCl3 valve closed
4/28/2011	2:50:57 PM	PH3 valve closed
4/28/2011	2:50:57 PM	SiCl4 pre valve closed
4/28/2011	2:50:57 PM	SiCl4 post valve closed
4/28/2011	2:50:57 PM	Bubbler valve closed
4/28/2011	2:50:57 PM	Helium valve opened
4/28/2011	2:50:57 PM	Main Vac valve opened
4/28/2011	2:50:57 PM	Bypass valve opened
4/28/2011	2:50:57 PM	Helium MFC set to  100.000000
4/28/2011	2:50:57 PM	H2 MFC set to  0.000000
4/28/2011	2:50:57 PM	BCl3 MFC set to  0.000000
4/28/2011	2:50:57 PM	PHl3 MFC set to  0.000000
4/28/2011	2:50:57 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:50:57 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:50:57 PM	Tube furnace set to 0
4/28/2011	2:51:57 PM	Helium valve closed
4/28/2011	2:51:57 PM	H2 valve closed
4/28/2011	2:51:57 PM	BCl3 valve closed
4/28/2011	2:51:57 PM	PH3 valve closed
4/28/2011	2:51:57 PM	SiCl4 pre valve closed
4/28/2011	2:51:57 PM	SiCl4 post valve closed
4/28/2011	2:51:57 PM	Bubbler valve closed
4/28/2011	2:51:57 PM	Main Vac valve opened
4/28/2011	2:51:57 PM	Bypass valve opened
4/28/2011	2:51:57 PM	Helium MFC set to  0.000000
4/28/2011	2:51:57 PM	H2 MFC set to  0.000000
4/28/2011	2:51:57 PM	BCl3 MFC set to  0.000000
4/28/2011	2:51:57 PM	PHl3 MFC set to  0.000000
4/28/2011	2:51:57 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:51:57 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:51:58 PM	Tube furnace set to 0
4/28/2011	2:52:58 PM	H2 valve closed
4/28/2011	2:52:58 PM	BCl3 valve closed
4/28/2011	2:52:58 PM	PH3 valve closed
4/28/2011	2:52:58 PM	SiCl4 pre valve closed
4/28/2011	2:52:58 PM	SiCl4 post valve closed
4/28/2011	2:52:58 PM	Bubbler valve closed
4/28/2011	2:52:58 PM	Helium valve opened
4/28/2011	2:52:58 PM	Main Vac valve opened
4/28/2011	2:52:58 PM	Bypass valve opened
4/28/2011	2:52:58 PM	Helium MFC set to  100.000000
4/28/2011	2:52:58 PM	H2 MFC set to  0.000000
4/28/2011	2:52:58 PM	BCl3 MFC set to  0.000000
4/28/2011	2:52:58 PM	PHl3 MFC set to  0.000000
4/28/2011	2:52:58 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:52:58 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:52:58 PM	Tube furnace set to 0
4/28/2011	2:53:58 PM	Helium valve closed
4/28/2011	2:53:58 PM	H2 valve closed
4/28/2011	2:53:58 PM	BCl3 valve closed
4/28/2011	2:53:58 PM	PH3 valve closed
4/28/2011	2:53:58 PM	SiCl4 pre valve closed
4/28/2011	2:53:58 PM	SiCl4 post valve closed
4/28/2011	2:53:58 PM	Bubbler valve closed
4/28/2011	2:53:58 PM	Main Vac valve opened
4/28/2011	2:53:58 PM	Bypass valve opened
4/28/2011	2:53:58 PM	Helium MFC set to  0.000000
4/28/2011	2:53:58 PM	H2 MFC set to  0.000000
4/28/2011	2:53:58 PM	BCl3 MFC set to  0.000000
4/28/2011	2:53:58 PM	PHl3 MFC set to  0.000000
4/28/2011	2:53:58 PM	SiCl4 MFC set to  0.000000
4/28/2011	2:53:58 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	2:53:58 PM	Tube furnace set to 0
4/28/2011	2:53:59 PM	Run finished at 2:53 PM
4/28/2011	2:53:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/28/2011	3:03:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/28/2011	3:03:50 PM	Recipe started at 3:03 PM
4/28/2011	3:03:50 PM	Helium valve closed
4/28/2011	3:03:50 PM	H2 valve closed
4/28/2011	3:03:50 PM	BCl3 valve closed
4/28/2011	3:03:50 PM	PH3 valve closed
4/28/2011	3:03:50 PM	SiCl4 pre valve closed
4/28/2011	3:03:50 PM	SiCl4 post valve closed
4/28/2011	3:03:50 PM	Main Vac valve closed
4/28/2011	3:03:50 PM	Bubbler valve closed
4/28/2011	3:03:50 PM	Bypass valve opened
4/28/2011	3:03:50 PM	Helium MFC set to  0.000000
4/28/2011	3:03:50 PM	H2 MFC set to  0.000000
4/28/2011	3:03:50 PM	BCl3 MFC set to  0.000000
4/28/2011	3:03:50 PM	PHl3 MFC set to  0.000000
4/28/2011	3:03:50 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:03:50 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:03:50 PM	Tube furnace set to 0
4/28/2011	3:03:50 PM	Helium valve closed
4/28/2011	3:03:50 PM	H2 valve closed
4/28/2011	3:03:50 PM	BCl3 valve closed
4/28/2011	3:03:50 PM	PH3 valve closed
4/28/2011	3:03:50 PM	SiCl4 pre valve closed
4/28/2011	3:03:50 PM	SiCl4 post valve closed
4/28/2011	3:03:50 PM	Bubbler valve closed
4/28/2011	3:03:50 PM	Main Vac valve opened
4/28/2011	3:03:50 PM	Bypass valve opened
4/28/2011	3:03:50 PM	Helium MFC set to  0.000000
4/28/2011	3:03:50 PM	H2 MFC set to  0.000000
4/28/2011	3:03:50 PM	BCl3 MFC set to  0.000000
4/28/2011	3:03:50 PM	PHl3 MFC set to  0.000000
4/28/2011	3:03:50 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:03:50 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:03:50 PM	Tube furnace set to 0
4/28/2011	3:04:50 PM	H2 valve closed
4/28/2011	3:04:50 PM	BCl3 valve closed
4/28/2011	3:04:50 PM	PH3 valve closed
4/28/2011	3:04:50 PM	SiCl4 pre valve closed
4/28/2011	3:04:50 PM	SiCl4 post valve closed
4/28/2011	3:04:50 PM	Bubbler valve closed
4/28/2011	3:04:50 PM	Helium valve opened
4/28/2011	3:04:50 PM	Main Vac valve opened
4/28/2011	3:04:50 PM	Bypass valve opened
4/28/2011	3:04:50 PM	Helium MFC set to  100.000000
4/28/2011	3:04:50 PM	H2 MFC set to  0.000000
4/28/2011	3:04:50 PM	BCl3 MFC set to  0.000000
4/28/2011	3:04:50 PM	PHl3 MFC set to  0.000000
4/28/2011	3:04:50 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:04:50 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:04:51 PM	Tube furnace set to 0
4/28/2011	3:05:51 PM	Helium valve closed
4/28/2011	3:05:51 PM	H2 valve closed
4/28/2011	3:05:51 PM	BCl3 valve closed
4/28/2011	3:05:51 PM	PH3 valve closed
4/28/2011	3:05:51 PM	SiCl4 pre valve closed
4/28/2011	3:05:51 PM	SiCl4 post valve closed
4/28/2011	3:05:51 PM	Bubbler valve closed
4/28/2011	3:05:51 PM	Main Vac valve opened
4/28/2011	3:05:51 PM	Bypass valve opened
4/28/2011	3:05:51 PM	Helium MFC set to  0.000000
4/28/2011	3:05:51 PM	H2 MFC set to  0.000000
4/28/2011	3:05:51 PM	BCl3 MFC set to  0.000000
4/28/2011	3:05:51 PM	PHl3 MFC set to  0.000000
4/28/2011	3:05:51 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:05:51 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:05:51 PM	Tube furnace set to 0
4/28/2011	3:06:51 PM	H2 valve closed
4/28/2011	3:06:51 PM	BCl3 valve closed
4/28/2011	3:06:51 PM	PH3 valve closed
4/28/2011	3:06:51 PM	SiCl4 pre valve closed
4/28/2011	3:06:51 PM	SiCl4 post valve closed
4/28/2011	3:06:51 PM	Bubbler valve closed
4/28/2011	3:06:51 PM	Helium valve opened
4/28/2011	3:06:51 PM	Main Vac valve opened
4/28/2011	3:06:51 PM	Bypass valve opened
4/28/2011	3:06:51 PM	Helium MFC set to  100.000000
4/28/2011	3:06:51 PM	H2 MFC set to  0.000000
4/28/2011	3:06:51 PM	BCl3 MFC set to  0.000000
4/28/2011	3:06:51 PM	PHl3 MFC set to  0.000000
4/28/2011	3:06:51 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:06:51 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:06:51 PM	Tube furnace set to 0
4/28/2011	3:07:51 PM	Helium valve closed
4/28/2011	3:07:51 PM	H2 valve closed
4/28/2011	3:07:51 PM	BCl3 valve closed
4/28/2011	3:07:51 PM	PH3 valve closed
4/28/2011	3:07:51 PM	SiCl4 pre valve closed
4/28/2011	3:07:51 PM	SiCl4 post valve closed
4/28/2011	3:07:51 PM	Bubbler valve closed
4/28/2011	3:07:51 PM	Main Vac valve opened
4/28/2011	3:07:51 PM	Bypass valve opened
4/28/2011	3:07:51 PM	Helium MFC set to  0.000000
4/28/2011	3:07:51 PM	H2 MFC set to  0.000000
4/28/2011	3:07:51 PM	BCl3 MFC set to  0.000000
4/28/2011	3:07:51 PM	PHl3 MFC set to  0.000000
4/28/2011	3:07:51 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:07:51 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:07:51 PM	Tube furnace set to 0
4/28/2011	3:08:51 PM	H2 valve closed
4/28/2011	3:08:51 PM	BCl3 valve closed
4/28/2011	3:08:51 PM	PH3 valve closed
4/28/2011	3:08:51 PM	SiCl4 pre valve closed
4/28/2011	3:08:51 PM	SiCl4 post valve closed
4/28/2011	3:08:51 PM	Bubbler valve closed
4/28/2011	3:08:51 PM	Helium valve opened
4/28/2011	3:08:51 PM	Main Vac valve opened
4/28/2011	3:08:51 PM	Bypass valve opened
4/28/2011	3:08:51 PM	Helium MFC set to  100.000000
4/28/2011	3:08:51 PM	H2 MFC set to  0.000000
4/28/2011	3:08:51 PM	BCl3 MFC set to  0.000000
4/28/2011	3:08:51 PM	PHl3 MFC set to  0.000000
4/28/2011	3:08:51 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:08:51 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:08:51 PM	Tube furnace set to 0
4/28/2011	3:09:51 PM	Helium valve closed
4/28/2011	3:09:51 PM	H2 valve closed
4/28/2011	3:09:51 PM	BCl3 valve closed
4/28/2011	3:09:51 PM	PH3 valve closed
4/28/2011	3:09:51 PM	SiCl4 pre valve closed
4/28/2011	3:09:51 PM	SiCl4 post valve closed
4/28/2011	3:09:51 PM	Bubbler valve closed
4/28/2011	3:09:51 PM	Main Vac valve opened
4/28/2011	3:09:51 PM	Bypass valve opened
4/28/2011	3:09:51 PM	Helium MFC set to  0.000000
4/28/2011	3:09:51 PM	H2 MFC set to  0.000000
4/28/2011	3:09:51 PM	BCl3 MFC set to  0.000000
4/28/2011	3:09:51 PM	PHl3 MFC set to  0.000000
4/28/2011	3:09:51 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:09:51 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:09:52 PM	Tube furnace set to 0
4/28/2011	3:10:52 PM	H2 valve closed
4/28/2011	3:10:52 PM	BCl3 valve closed
4/28/2011	3:10:52 PM	PH3 valve closed
4/28/2011	3:10:52 PM	SiCl4 pre valve closed
4/28/2011	3:10:52 PM	SiCl4 post valve closed
4/28/2011	3:10:52 PM	Bubbler valve closed
4/28/2011	3:10:52 PM	Helium valve opened
4/28/2011	3:10:52 PM	Main Vac valve opened
4/28/2011	3:10:52 PM	Bypass valve opened
4/28/2011	3:10:52 PM	Helium MFC set to  100.000000
4/28/2011	3:10:52 PM	H2 MFC set to  0.000000
4/28/2011	3:10:52 PM	BCl3 MFC set to  0.000000
4/28/2011	3:10:52 PM	PHl3 MFC set to  0.000000
4/28/2011	3:10:52 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:10:52 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:10:52 PM	Tube furnace set to 0
4/28/2011	3:11:52 PM	Helium valve closed
4/28/2011	3:11:52 PM	H2 valve closed
4/28/2011	3:11:52 PM	BCl3 valve closed
4/28/2011	3:11:52 PM	PH3 valve closed
4/28/2011	3:11:52 PM	SiCl4 pre valve closed
4/28/2011	3:11:52 PM	SiCl4 post valve closed
4/28/2011	3:11:52 PM	Bubbler valve closed
4/28/2011	3:11:52 PM	Main Vac valve opened
4/28/2011	3:11:52 PM	Bypass valve opened
4/28/2011	3:11:52 PM	Helium MFC set to  0.000000
4/28/2011	3:11:52 PM	H2 MFC set to  0.000000
4/28/2011	3:11:52 PM	BCl3 MFC set to  0.000000
4/28/2011	3:11:52 PM	PHl3 MFC set to  0.000000
4/28/2011	3:11:52 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:11:52 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:11:52 PM	Tube furnace set to 0
4/28/2011	3:12:52 PM	H2 valve closed
4/28/2011	3:12:52 PM	BCl3 valve closed
4/28/2011	3:12:52 PM	PH3 valve closed
4/28/2011	3:12:52 PM	SiCl4 pre valve closed
4/28/2011	3:12:52 PM	SiCl4 post valve closed
4/28/2011	3:12:52 PM	Bubbler valve closed
4/28/2011	3:12:52 PM	Helium valve opened
4/28/2011	3:12:52 PM	Main Vac valve opened
4/28/2011	3:12:52 PM	Bypass valve opened
4/28/2011	3:12:52 PM	Helium MFC set to  100.000000
4/28/2011	3:12:52 PM	H2 MFC set to  0.000000
4/28/2011	3:12:52 PM	BCl3 MFC set to  0.000000
4/28/2011	3:12:52 PM	PHl3 MFC set to  0.000000
4/28/2011	3:12:52 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:12:52 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:12:52 PM	Tube furnace set to 0
4/28/2011	3:13:52 PM	Helium valve closed
4/28/2011	3:13:52 PM	H2 valve closed
4/28/2011	3:13:52 PM	BCl3 valve closed
4/28/2011	3:13:52 PM	PH3 valve closed
4/28/2011	3:13:52 PM	SiCl4 pre valve closed
4/28/2011	3:13:52 PM	SiCl4 post valve closed
4/28/2011	3:13:52 PM	Bubbler valve closed
4/28/2011	3:13:52 PM	Main Vac valve opened
4/28/2011	3:13:52 PM	Bypass valve opened
4/28/2011	3:13:52 PM	Helium MFC set to  0.000000
4/28/2011	3:13:52 PM	H2 MFC set to  0.000000
4/28/2011	3:13:52 PM	BCl3 MFC set to  0.000000
4/28/2011	3:13:52 PM	PHl3 MFC set to  0.000000
4/28/2011	3:13:52 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:13:52 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:13:52 PM	Tube furnace set to 0
4/28/2011	3:14:52 PM	H2 valve closed
4/28/2011	3:14:52 PM	BCl3 valve closed
4/28/2011	3:14:52 PM	PH3 valve closed
4/28/2011	3:14:52 PM	SiCl4 pre valve closed
4/28/2011	3:14:52 PM	SiCl4 post valve closed
4/28/2011	3:14:52 PM	Bubbler valve closed
4/28/2011	3:14:52 PM	Helium valve opened
4/28/2011	3:14:52 PM	Main Vac valve opened
4/28/2011	3:14:52 PM	Bypass valve opened
4/28/2011	3:14:52 PM	Helium MFC set to  100.000000
4/28/2011	3:14:52 PM	H2 MFC set to  0.000000
4/28/2011	3:14:52 PM	BCl3 MFC set to  0.000000
4/28/2011	3:14:52 PM	PHl3 MFC set to  0.000000
4/28/2011	3:14:52 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:14:52 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:14:53 PM	Tube furnace set to 0
4/28/2011	3:15:53 PM	Helium valve closed
4/28/2011	3:15:53 PM	H2 valve closed
4/28/2011	3:15:53 PM	BCl3 valve closed
4/28/2011	3:15:53 PM	PH3 valve closed
4/28/2011	3:15:53 PM	SiCl4 pre valve closed
4/28/2011	3:15:53 PM	SiCl4 post valve closed
4/28/2011	3:15:53 PM	Bubbler valve closed
4/28/2011	3:15:53 PM	Main Vac valve opened
4/28/2011	3:15:53 PM	Bypass valve opened
4/28/2011	3:15:53 PM	Helium MFC set to  0.000000
4/28/2011	3:15:53 PM	H2 MFC set to  0.000000
4/28/2011	3:15:53 PM	BCl3 MFC set to  0.000000
4/28/2011	3:15:53 PM	PHl3 MFC set to  0.000000
4/28/2011	3:15:53 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:15:53 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:15:53 PM	Tube furnace set to 0
4/28/2011	3:16:53 PM	H2 valve closed
4/28/2011	3:16:53 PM	BCl3 valve closed
4/28/2011	3:16:53 PM	PH3 valve closed
4/28/2011	3:16:53 PM	SiCl4 pre valve closed
4/28/2011	3:16:53 PM	SiCl4 post valve closed
4/28/2011	3:16:53 PM	Bubbler valve closed
4/28/2011	3:16:53 PM	Helium valve opened
4/28/2011	3:16:53 PM	Main Vac valve opened
4/28/2011	3:16:53 PM	Bypass valve opened
4/28/2011	3:16:53 PM	Helium MFC set to  100.000000
4/28/2011	3:16:53 PM	H2 MFC set to  0.000000
4/28/2011	3:16:53 PM	BCl3 MFC set to  0.000000
4/28/2011	3:16:53 PM	PHl3 MFC set to  0.000000
4/28/2011	3:16:53 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:16:53 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:16:53 PM	Tube furnace set to 0
4/28/2011	3:17:53 PM	Helium valve closed
4/28/2011	3:17:53 PM	H2 valve closed
4/28/2011	3:17:53 PM	BCl3 valve closed
4/28/2011	3:17:53 PM	PH3 valve closed
4/28/2011	3:17:53 PM	SiCl4 pre valve closed
4/28/2011	3:17:53 PM	SiCl4 post valve closed
4/28/2011	3:17:53 PM	Bubbler valve closed
4/28/2011	3:17:53 PM	Main Vac valve opened
4/28/2011	3:17:53 PM	Bypass valve opened
4/28/2011	3:17:53 PM	Helium MFC set to  0.000000
4/28/2011	3:17:53 PM	H2 MFC set to  0.000000
4/28/2011	3:17:53 PM	BCl3 MFC set to  0.000000
4/28/2011	3:17:53 PM	PHl3 MFC set to  0.000000
4/28/2011	3:17:53 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:17:53 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:17:53 PM	Tube furnace set to 0
4/28/2011	3:18:53 PM	H2 valve closed
4/28/2011	3:18:53 PM	BCl3 valve closed
4/28/2011	3:18:53 PM	PH3 valve closed
4/28/2011	3:18:53 PM	SiCl4 pre valve closed
4/28/2011	3:18:53 PM	SiCl4 post valve closed
4/28/2011	3:18:53 PM	Bubbler valve closed
4/28/2011	3:18:53 PM	Helium valve opened
4/28/2011	3:18:53 PM	Main Vac valve opened
4/28/2011	3:18:53 PM	Bypass valve opened
4/28/2011	3:18:53 PM	Helium MFC set to  100.000000
4/28/2011	3:18:53 PM	H2 MFC set to  0.000000
4/28/2011	3:18:53 PM	BCl3 MFC set to  0.000000
4/28/2011	3:18:53 PM	PHl3 MFC set to  0.000000
4/28/2011	3:18:53 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:18:53 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:18:53 PM	Tube furnace set to 0
4/28/2011	3:19:53 PM	Helium valve closed
4/28/2011	3:19:53 PM	H2 valve closed
4/28/2011	3:19:53 PM	BCl3 valve closed
4/28/2011	3:19:53 PM	PH3 valve closed
4/28/2011	3:19:53 PM	SiCl4 pre valve closed
4/28/2011	3:19:53 PM	SiCl4 post valve closed
4/28/2011	3:19:53 PM	Bubbler valve closed
4/28/2011	3:19:53 PM	Main Vac valve opened
4/28/2011	3:19:53 PM	Bypass valve opened
4/28/2011	3:19:53 PM	Helium MFC set to  0.000000
4/28/2011	3:19:53 PM	H2 MFC set to  0.000000
4/28/2011	3:19:53 PM	BCl3 MFC set to  0.000000
4/28/2011	3:19:53 PM	PHl3 MFC set to  0.000000
4/28/2011	3:19:53 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:19:53 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:19:54 PM	Tube furnace set to 0
4/28/2011	3:20:54 PM	H2 valve closed
4/28/2011	3:20:54 PM	BCl3 valve closed
4/28/2011	3:20:54 PM	PH3 valve closed
4/28/2011	3:20:54 PM	SiCl4 pre valve closed
4/28/2011	3:20:54 PM	SiCl4 post valve closed
4/28/2011	3:20:54 PM	Bubbler valve closed
4/28/2011	3:20:54 PM	Helium valve opened
4/28/2011	3:20:54 PM	Main Vac valve opened
4/28/2011	3:20:54 PM	Bypass valve opened
4/28/2011	3:20:54 PM	Helium MFC set to  100.000000
4/28/2011	3:20:54 PM	H2 MFC set to  0.000000
4/28/2011	3:20:54 PM	BCl3 MFC set to  0.000000
4/28/2011	3:20:54 PM	PHl3 MFC set to  0.000000
4/28/2011	3:20:54 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:20:54 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:20:54 PM	Tube furnace set to 0
4/28/2011	3:21:54 PM	Helium valve closed
4/28/2011	3:21:54 PM	H2 valve closed
4/28/2011	3:21:54 PM	BCl3 valve closed
4/28/2011	3:21:54 PM	PH3 valve closed
4/28/2011	3:21:54 PM	SiCl4 pre valve closed
4/28/2011	3:21:54 PM	SiCl4 post valve closed
4/28/2011	3:21:54 PM	Bubbler valve closed
4/28/2011	3:21:54 PM	Main Vac valve opened
4/28/2011	3:21:54 PM	Bypass valve opened
4/28/2011	3:21:54 PM	Helium MFC set to  0.000000
4/28/2011	3:21:54 PM	H2 MFC set to  0.000000
4/28/2011	3:21:54 PM	BCl3 MFC set to  0.000000
4/28/2011	3:21:54 PM	PHl3 MFC set to  0.000000
4/28/2011	3:21:54 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:21:54 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:21:54 PM	Tube furnace set to 0
4/28/2011	3:22:54 PM	H2 valve closed
4/28/2011	3:22:54 PM	BCl3 valve closed
4/28/2011	3:22:54 PM	PH3 valve closed
4/28/2011	3:22:54 PM	SiCl4 pre valve closed
4/28/2011	3:22:54 PM	SiCl4 post valve closed
4/28/2011	3:22:54 PM	Bubbler valve closed
4/28/2011	3:22:54 PM	Helium valve opened
4/28/2011	3:22:54 PM	Main Vac valve opened
4/28/2011	3:22:54 PM	Bypass valve opened
4/28/2011	3:22:54 PM	Helium MFC set to  100.000000
4/28/2011	3:22:54 PM	H2 MFC set to  0.000000
4/28/2011	3:22:54 PM	BCl3 MFC set to  0.000000
4/28/2011	3:22:54 PM	PHl3 MFC set to  0.000000
4/28/2011	3:22:54 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:22:54 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:22:54 PM	Tube furnace set to 0
4/28/2011	3:23:54 PM	Helium valve closed
4/28/2011	3:23:54 PM	H2 valve closed
4/28/2011	3:23:54 PM	BCl3 valve closed
4/28/2011	3:23:54 PM	PH3 valve closed
4/28/2011	3:23:54 PM	SiCl4 pre valve closed
4/28/2011	3:23:54 PM	SiCl4 post valve closed
4/28/2011	3:23:54 PM	Bubbler valve closed
4/28/2011	3:23:54 PM	Main Vac valve opened
4/28/2011	3:23:54 PM	Bypass valve opened
4/28/2011	3:23:54 PM	Helium MFC set to  0.000000
4/28/2011	3:23:54 PM	H2 MFC set to  0.000000
4/28/2011	3:23:54 PM	BCl3 MFC set to  0.000000
4/28/2011	3:23:54 PM	PHl3 MFC set to  0.000000
4/28/2011	3:23:54 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:23:54 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:23:54 PM	Tube furnace set to 0
4/28/2011	3:23:55 PM	Run finished at 3:23 PM
4/28/2011	3:23:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/28/2011	3:25:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/28/2011	3:25:42 PM	Recipe started at 3:25 PM
4/28/2011	3:25:42 PM	Helium valve closed
4/28/2011	3:25:42 PM	H2 valve closed
4/28/2011	3:25:42 PM	BCl3 valve closed
4/28/2011	3:25:42 PM	PH3 valve closed
4/28/2011	3:25:42 PM	SiCl4 pre valve closed
4/28/2011	3:25:42 PM	SiCl4 post valve closed
4/28/2011	3:25:42 PM	Main Vac valve closed
4/28/2011	3:25:42 PM	Bypass valve closed
4/28/2011	3:25:42 PM	Bubbler valve closed
4/28/2011	3:25:42 PM	Helium MFC set to  0.000000
4/28/2011	3:25:42 PM	H2 MFC set to  0.000000
4/28/2011	3:25:42 PM	BCl3 MFC set to  0.000000
4/28/2011	3:25:42 PM	PHl3 MFC set to  0.000000
4/28/2011	3:25:42 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:25:42 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:25:42 PM	Tube furnace set to 0
4/28/2011	3:25:43 PM	Run finished at 3:25 PM
4/28/2011	3:25:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/28/2011	3:26:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	3:26:06 PM	Recipe started at 3:26 PM
4/28/2011	3:26:06 PM	Helium valve closed
4/28/2011	3:26:06 PM	H2 valve closed
4/28/2011	3:26:06 PM	BCl3 valve closed
4/28/2011	3:26:06 PM	PH3 valve closed
4/28/2011	3:26:06 PM	SiCl4 pre valve closed
4/28/2011	3:26:06 PM	SiCl4 post valve closed
4/28/2011	3:26:06 PM	Main Vac valve closed
4/28/2011	3:26:06 PM	Bubbler valve closed
4/28/2011	3:26:06 PM	Bypass valve opened
4/28/2011	3:26:06 PM	Helium MFC set to  0.000000
4/28/2011	3:26:06 PM	H2 MFC set to  0.000000
4/28/2011	3:26:06 PM	BCl3 MFC set to  0.000000
4/28/2011	3:26:06 PM	PHl3 MFC set to  0.000000
4/28/2011	3:26:06 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:26:06 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:26:06 PM	Tube furnace set to 0
4/28/2011	3:26:07 PM	Helium valve closed
4/28/2011	3:26:07 PM	H2 valve closed
4/28/2011	3:26:07 PM	BCl3 valve closed
4/28/2011	3:26:07 PM	PH3 valve closed
4/28/2011	3:26:07 PM	SiCl4 pre valve closed
4/28/2011	3:26:07 PM	SiCl4 post valve closed
4/28/2011	3:26:07 PM	Bubbler valve closed
4/28/2011	3:26:07 PM	Main Vac valve opened
4/28/2011	3:26:07 PM	Bypass valve opened
4/28/2011	3:26:07 PM	Helium MFC set to  0.000000
4/28/2011	3:26:07 PM	H2 MFC set to  0.000000
4/28/2011	3:26:07 PM	BCl3 MFC set to  0.000000
4/28/2011	3:26:07 PM	PHl3 MFC set to  0.000000
4/28/2011	3:26:07 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:26:07 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:26:07 PM	Tube furnace set to 0
4/28/2011	3:26:07 PM	Run finished at 3:26 PM
4/28/2011	3:26:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	3:28:09 PM	Recipe started at 3:28 PM
4/28/2011	3:28:09 PM	Helium valve closed
4/28/2011	3:28:09 PM	BCl3 valve closed
4/28/2011	3:28:09 PM	PH3 valve closed
4/28/2011	3:28:09 PM	SiCl4 pre valve closed
4/28/2011	3:28:09 PM	SiCl4 post valve closed
4/28/2011	3:28:09 PM	Main Vac valve closed
4/28/2011	3:28:09 PM	Bypass valve closed
4/28/2011	3:28:09 PM	Bubbler valve closed
4/28/2011	3:28:09 PM	H2 valve opened
4/28/2011	3:28:09 PM	Helium MFC set to  0.000000
4/28/2011	3:28:09 PM	H2 MFC set to  500.000000
4/28/2011	3:28:09 PM	BCl3 MFC set to  0.000000
4/28/2011	3:28:09 PM	PHl3 MFC set to  0.000000
4/28/2011	3:28:09 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:28:09 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:28:09 PM	Tube furnace set to 100
4/28/2011	3:29:28 PM	Helium valve closed
4/28/2011	3:29:28 PM	BCl3 valve closed
4/28/2011	3:29:28 PM	PH3 valve closed
4/28/2011	3:29:28 PM	SiCl4 pre valve closed
4/28/2011	3:29:28 PM	SiCl4 post valve closed
4/28/2011	3:29:28 PM	Main Vac valve closed
4/28/2011	3:29:28 PM	Bypass valve closed
4/28/2011	3:29:28 PM	H2 valve opened
4/28/2011	3:29:28 PM	Bubbler valve opened
4/28/2011	3:29:28 PM	Helium MFC set to  0.000000
4/28/2011	3:29:28 PM	H2 MFC set to  500.000000
4/28/2011	3:29:28 PM	BCl3 MFC set to  0.000000
4/28/2011	3:29:28 PM	PHl3 MFC set to  0.000000
4/28/2011	3:29:28 PM	SiCl4 MFC set to  0.000000
4/28/2011	3:29:28 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:29:28 PM	Tube furnace set to 1000
4/28/2011	3:49:28 PM	Helium valve closed
4/28/2011	3:49:28 PM	PH3 valve closed
4/28/2011	3:49:28 PM	Main Vac valve closed
4/28/2011	3:49:28 PM	Bypass valve closed
4/28/2011	3:49:28 PM	H2 valve opened
4/28/2011	3:49:28 PM	BCl3 valve opened
4/28/2011	3:49:28 PM	SiCl4 pre valve opened
4/28/2011	3:49:28 PM	SiCl4 post valve opened
4/28/2011	3:49:28 PM	Bubbler valve opened
4/28/2011	3:49:28 PM	Helium MFC set to  0.000000
4/28/2011	3:49:28 PM	H2 MFC set to  500.000000
4/28/2011	3:49:28 PM	BCl3 MFC set to  3.000000
4/28/2011	3:49:28 PM	PHl3 MFC set to  0.000000
4/28/2011	3:49:28 PM	SiCl4 MFC set to  50.000000
4/28/2011	3:49:28 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	3:49:28 PM	Tube furnace set to 1000
4/28/2011	4:06:08 PM	H2 valve closed
4/28/2011	4:06:08 PM	BCl3 valve closed
4/28/2011	4:06:08 PM	PH3 valve closed
4/28/2011	4:06:08 PM	SiCl4 pre valve closed
4/28/2011	4:06:08 PM	SiCl4 post valve closed
4/28/2011	4:06:08 PM	Main Vac valve closed
4/28/2011	4:06:08 PM	Bypass valve closed
4/28/2011	4:06:08 PM	Helium valve opened
4/28/2011	4:06:08 PM	Bubbler valve opened
4/28/2011	4:06:08 PM	Helium MFC set to  500.000000
4/28/2011	4:06:08 PM	H2 MFC set to  0.000000
4/28/2011	4:06:08 PM	BCl3 MFC set to  0.000000
4/28/2011	4:06:08 PM	PHl3 MFC set to  0.000000
4/28/2011	4:06:08 PM	SiCl4 MFC set to  0.000000
4/28/2011	4:06:08 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	4:06:08 PM	Tube furnace set to 0
4/28/2011	4:26:08 PM	Helium valve closed
4/28/2011	4:26:08 PM	H2 valve closed
4/28/2011	4:26:08 PM	BCl3 valve closed
4/28/2011	4:26:08 PM	PH3 valve closed
4/28/2011	4:26:08 PM	SiCl4 pre valve closed
4/28/2011	4:26:08 PM	SiCl4 post valve closed
4/28/2011	4:26:08 PM	Main Vac valve closed
4/28/2011	4:26:08 PM	Bypass valve closed
4/28/2011	4:26:08 PM	Bubbler valve closed
4/28/2011	4:26:08 PM	Helium MFC set to  0.000000
4/28/2011	4:26:08 PM	H2 MFC set to  0.000000
4/28/2011	4:26:08 PM	BCl3 MFC set to  0.000000
4/28/2011	4:26:08 PM	PHl3 MFC set to  0.000000
4/28/2011	4:26:08 PM	SiCl4 MFC set to  0.000000
4/28/2011	4:26:08 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	4:26:09 PM	Tube furnace set to 0
4/28/2011	4:26:09 PM	Run finished at 4:26 PM
4/28/2011	5:42:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/28/2011	5:42:39 PM	Recipe started at 5:42 PM
4/28/2011	5:42:39 PM	H2 valve closed
4/28/2011	5:42:39 PM	BCl3 valve closed
4/28/2011	5:42:39 PM	PH3 valve closed
4/28/2011	5:42:40 PM	SiCl4 pre valve closed
4/28/2011	5:42:40 PM	SiCl4 post valve closed
4/28/2011	5:42:40 PM	Main Vac valve closed
4/28/2011	5:42:40 PM	Bypass valve closed
4/28/2011	5:42:40 PM	Bubbler valve closed
4/28/2011	5:42:40 PM	Helium valve opened
4/28/2011	5:42:40 PM	Helium MFC set to  500.000000
4/28/2011	5:42:40 PM	H2 MFC set to  0.000000
4/28/2011	5:42:40 PM	BCl3 MFC set to  0.000000
4/28/2011	5:42:40 PM	PHl3 MFC set to  0.000000
4/28/2011	5:42:40 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:42:40 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:42:40 PM	Tube furnace set to 0
4/28/2011	5:42:44 PM	Helium valve closed
4/28/2011	5:42:44 PM	H2 valve closed
4/28/2011	5:42:44 PM	BCl3 valve closed
4/28/2011	5:42:44 PM	PH3 valve closed
4/28/2011	5:42:44 PM	SiCl4 pre valve closed
4/28/2011	5:42:44 PM	SiCl4 post valve closed
4/28/2011	5:42:44 PM	Main Vac valve closed
4/28/2011	5:42:44 PM	Bypass valve closed
4/28/2011	5:42:44 PM	Bubbler valve closed
4/28/2011	5:42:44 PM	Helium MFC set to  0.000000
4/28/2011	5:42:44 PM	H2 MFC set to  0.000000
4/28/2011	5:42:44 PM	BCl3 MFC set to  0.000000
4/28/2011	5:42:44 PM	PHl3 MFC set to  0.000000
4/28/2011	5:42:44 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:42:44 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:42:44 PM	Tube furnace set to 0
4/28/2011	5:42:44 PM	Run finished at 5:42 PM
4/28/2011	5:42:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/28/2011	5:49:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	5:49:22 PM	Recipe started at 5:49 PM
4/28/2011	5:49:22 PM	Helium valve closed
4/28/2011	5:49:22 PM	H2 valve closed
4/28/2011	5:49:22 PM	BCl3 valve closed
4/28/2011	5:49:22 PM	PH3 valve closed
4/28/2011	5:49:22 PM	SiCl4 pre valve closed
4/28/2011	5:49:22 PM	SiCl4 post valve closed
4/28/2011	5:49:22 PM	Main Vac valve closed
4/28/2011	5:49:22 PM	Bubbler valve closed
4/28/2011	5:49:22 PM	Bypass valve opened
4/28/2011	5:49:22 PM	Helium MFC set to  0.000000
4/28/2011	5:49:22 PM	H2 MFC set to  0.000000
4/28/2011	5:49:22 PM	BCl3 MFC set to  0.000000
4/28/2011	5:49:22 PM	PHl3 MFC set to  0.000000
4/28/2011	5:49:22 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:49:22 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:49:22 PM	Tube furnace set to 0
4/28/2011	5:49:54 PM	Helium valve closed
4/28/2011	5:49:54 PM	H2 valve closed
4/28/2011	5:49:54 PM	BCl3 valve closed
4/28/2011	5:49:54 PM	PH3 valve closed
4/28/2011	5:49:54 PM	SiCl4 pre valve closed
4/28/2011	5:49:54 PM	SiCl4 post valve closed
4/28/2011	5:49:54 PM	Bubbler valve closed
4/28/2011	5:49:54 PM	Main Vac valve opened
4/28/2011	5:49:54 PM	Bypass valve opened
4/28/2011	5:49:54 PM	Helium MFC set to  0.000000
4/28/2011	5:49:54 PM	H2 MFC set to  0.000000
4/28/2011	5:49:54 PM	BCl3 MFC set to  0.000000
4/28/2011	5:49:54 PM	PHl3 MFC set to  0.000000
4/28/2011	5:49:54 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:49:54 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:49:55 PM	Tube furnace set to 0
4/28/2011	5:49:55 PM	Run finished at 5:49 PM
4/28/2011	5:49:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	5:50:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/28/2011	5:50:59 PM	Recipe started at 5:50 PM
4/28/2011	5:50:59 PM	Helium valve closed
4/28/2011	5:50:59 PM	H2 valve closed
4/28/2011	5:50:59 PM	BCl3 valve closed
4/28/2011	5:50:59 PM	PH3 valve closed
4/28/2011	5:50:59 PM	SiCl4 pre valve closed
4/28/2011	5:50:59 PM	SiCl4 post valve closed
4/28/2011	5:50:59 PM	Main Vac valve closed
4/28/2011	5:50:59 PM	Bypass valve closed
4/28/2011	5:50:59 PM	Bubbler valve closed
4/28/2011	5:50:59 PM	Helium MFC set to  0.000000
4/28/2011	5:50:59 PM	H2 MFC set to  0.000000
4/28/2011	5:50:59 PM	BCl3 MFC set to  0.000000
4/28/2011	5:50:59 PM	PHl3 MFC set to  0.000000
4/28/2011	5:50:59 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:50:59 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:50:59 PM	Tube furnace set to 0
4/28/2011	5:50:59 PM	Run finished at 5:50 PM
4/28/2011	5:50:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/28/2011	5:51:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	5:51:12 PM	Recipe started at 5:51 PM
4/28/2011	5:51:12 PM	Helium valve closed
4/28/2011	5:51:12 PM	H2 valve closed
4/28/2011	5:51:12 PM	BCl3 valve closed
4/28/2011	5:51:12 PM	PH3 valve closed
4/28/2011	5:51:12 PM	SiCl4 pre valve closed
4/28/2011	5:51:12 PM	SiCl4 post valve closed
4/28/2011	5:51:12 PM	Main Vac valve closed
4/28/2011	5:51:12 PM	Bubbler valve closed
4/28/2011	5:51:12 PM	Bypass valve opened
4/28/2011	5:51:12 PM	Helium MFC set to  0.000000
4/28/2011	5:51:12 PM	H2 MFC set to  0.000000
4/28/2011	5:51:12 PM	BCl3 MFC set to  0.000000
4/28/2011	5:51:12 PM	PHl3 MFC set to  0.000000
4/28/2011	5:51:12 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:51:12 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:51:12 PM	Tube furnace set to 0
4/28/2011	5:51:13 PM	Helium valve closed
4/28/2011	5:51:13 PM	H2 valve closed
4/28/2011	5:51:13 PM	BCl3 valve closed
4/28/2011	5:51:13 PM	PH3 valve closed
4/28/2011	5:51:13 PM	SiCl4 pre valve closed
4/28/2011	5:51:13 PM	SiCl4 post valve closed
4/28/2011	5:51:13 PM	Bubbler valve closed
4/28/2011	5:51:13 PM	Main Vac valve opened
4/28/2011	5:51:13 PM	Bypass valve opened
4/28/2011	5:51:13 PM	Helium MFC set to  0.000000
4/28/2011	5:51:13 PM	H2 MFC set to  0.000000
4/28/2011	5:51:13 PM	BCl3 MFC set to  0.000000
4/28/2011	5:51:13 PM	PHl3 MFC set to  0.000000
4/28/2011	5:51:13 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:51:13 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:51:13 PM	Tube furnace set to 0
4/28/2011	5:51:13 PM	Run finished at 5:51 PM
4/28/2011	5:51:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	5:51:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/28/2011	5:51:57 PM	Recipe started at 5:51 PM
4/28/2011	5:51:57 PM	Helium valve closed
4/28/2011	5:51:57 PM	H2 valve closed
4/28/2011	5:51:57 PM	BCl3 valve closed
4/28/2011	5:51:57 PM	PH3 valve closed
4/28/2011	5:51:57 PM	SiCl4 pre valve closed
4/28/2011	5:51:57 PM	SiCl4 post valve closed
4/28/2011	5:51:57 PM	Main Vac valve closed
4/28/2011	5:51:57 PM	Bubbler valve closed
4/28/2011	5:51:57 PM	Bypass valve opened
4/28/2011	5:51:57 PM	Helium MFC set to  0.000000
4/28/2011	5:51:57 PM	H2 MFC set to  0.000000
4/28/2011	5:51:57 PM	BCl3 MFC set to  0.000000
4/28/2011	5:51:57 PM	PHl3 MFC set to  0.000000
4/28/2011	5:51:57 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:51:57 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:51:57 PM	Tube furnace set to 0
4/28/2011	5:51:57 PM	Helium valve closed
4/28/2011	5:51:57 PM	H2 valve closed
4/28/2011	5:51:57 PM	BCl3 valve closed
4/28/2011	5:51:57 PM	PH3 valve closed
4/28/2011	5:51:57 PM	SiCl4 pre valve closed
4/28/2011	5:51:57 PM	SiCl4 post valve closed
4/28/2011	5:51:57 PM	Bubbler valve closed
4/28/2011	5:51:57 PM	Main Vac valve opened
4/28/2011	5:51:57 PM	Bypass valve opened
4/28/2011	5:51:57 PM	Helium MFC set to  0.000000
4/28/2011	5:51:57 PM	H2 MFC set to  0.000000
4/28/2011	5:51:57 PM	BCl3 MFC set to  0.000000
4/28/2011	5:51:57 PM	PHl3 MFC set to  0.000000
4/28/2011	5:51:57 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:51:57 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:51:57 PM	Tube furnace set to 0
4/28/2011	5:52:57 PM	H2 valve closed
4/28/2011	5:52:57 PM	BCl3 valve closed
4/28/2011	5:52:57 PM	PH3 valve closed
4/28/2011	5:52:57 PM	SiCl4 pre valve closed
4/28/2011	5:52:57 PM	SiCl4 post valve closed
4/28/2011	5:52:57 PM	Bubbler valve closed
4/28/2011	5:52:57 PM	Helium valve opened
4/28/2011	5:52:57 PM	Main Vac valve opened
4/28/2011	5:52:57 PM	Bypass valve opened
4/28/2011	5:52:57 PM	Helium MFC set to  100.000000
4/28/2011	5:52:57 PM	H2 MFC set to  0.000000
4/28/2011	5:52:57 PM	BCl3 MFC set to  0.000000
4/28/2011	5:52:57 PM	PHl3 MFC set to  0.000000
4/28/2011	5:52:57 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:52:57 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:52:57 PM	Tube furnace set to 0
4/28/2011	5:53:57 PM	Helium valve closed
4/28/2011	5:53:57 PM	H2 valve closed
4/28/2011	5:53:57 PM	BCl3 valve closed
4/28/2011	5:53:57 PM	PH3 valve closed
4/28/2011	5:53:57 PM	SiCl4 pre valve closed
4/28/2011	5:53:57 PM	SiCl4 post valve closed
4/28/2011	5:53:57 PM	Bubbler valve closed
4/28/2011	5:53:57 PM	Main Vac valve opened
4/28/2011	5:53:57 PM	Bypass valve opened
4/28/2011	5:53:57 PM	Helium MFC set to  0.000000
4/28/2011	5:53:57 PM	H2 MFC set to  0.000000
4/28/2011	5:53:57 PM	BCl3 MFC set to  0.000000
4/28/2011	5:53:57 PM	PHl3 MFC set to  0.000000
4/28/2011	5:53:57 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:53:57 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:53:58 PM	Tube furnace set to 0
4/28/2011	5:54:58 PM	H2 valve closed
4/28/2011	5:54:58 PM	BCl3 valve closed
4/28/2011	5:54:58 PM	PH3 valve closed
4/28/2011	5:54:58 PM	SiCl4 pre valve closed
4/28/2011	5:54:58 PM	SiCl4 post valve closed
4/28/2011	5:54:58 PM	Bubbler valve closed
4/28/2011	5:54:58 PM	Helium valve opened
4/28/2011	5:54:58 PM	Main Vac valve opened
4/28/2011	5:54:58 PM	Bypass valve opened
4/28/2011	5:54:58 PM	Helium MFC set to  100.000000
4/28/2011	5:54:58 PM	H2 MFC set to  0.000000
4/28/2011	5:54:58 PM	BCl3 MFC set to  0.000000
4/28/2011	5:54:58 PM	PHl3 MFC set to  0.000000
4/28/2011	5:54:58 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:54:58 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:54:58 PM	Tube furnace set to 0
4/28/2011	5:55:58 PM	Helium valve closed
4/28/2011	5:55:58 PM	H2 valve closed
4/28/2011	5:55:58 PM	BCl3 valve closed
4/28/2011	5:55:58 PM	PH3 valve closed
4/28/2011	5:55:58 PM	SiCl4 pre valve closed
4/28/2011	5:55:58 PM	SiCl4 post valve closed
4/28/2011	5:55:58 PM	Bubbler valve closed
4/28/2011	5:55:58 PM	Main Vac valve opened
4/28/2011	5:55:58 PM	Bypass valve opened
4/28/2011	5:55:58 PM	Helium MFC set to  0.000000
4/28/2011	5:55:58 PM	H2 MFC set to  0.000000
4/28/2011	5:55:58 PM	BCl3 MFC set to  0.000000
4/28/2011	5:55:58 PM	PHl3 MFC set to  0.000000
4/28/2011	5:55:58 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:55:58 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:55:58 PM	Tube furnace set to 0
4/28/2011	5:56:58 PM	H2 valve closed
4/28/2011	5:56:58 PM	BCl3 valve closed
4/28/2011	5:56:58 PM	PH3 valve closed
4/28/2011	5:56:58 PM	SiCl4 pre valve closed
4/28/2011	5:56:58 PM	SiCl4 post valve closed
4/28/2011	5:56:58 PM	Bubbler valve closed
4/28/2011	5:56:58 PM	Helium valve opened
4/28/2011	5:56:58 PM	Main Vac valve opened
4/28/2011	5:56:58 PM	Bypass valve opened
4/28/2011	5:56:58 PM	Helium MFC set to  100.000000
4/28/2011	5:56:58 PM	H2 MFC set to  0.000000
4/28/2011	5:56:58 PM	BCl3 MFC set to  0.000000
4/28/2011	5:56:58 PM	PHl3 MFC set to  0.000000
4/28/2011	5:56:58 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:56:58 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:56:58 PM	Tube furnace set to 0
4/28/2011	5:57:58 PM	Helium valve closed
4/28/2011	5:57:58 PM	H2 valve closed
4/28/2011	5:57:58 PM	BCl3 valve closed
4/28/2011	5:57:58 PM	PH3 valve closed
4/28/2011	5:57:58 PM	SiCl4 pre valve closed
4/28/2011	5:57:58 PM	SiCl4 post valve closed
4/28/2011	5:57:58 PM	Bubbler valve closed
4/28/2011	5:57:58 PM	Main Vac valve opened
4/28/2011	5:57:58 PM	Bypass valve opened
4/28/2011	5:57:58 PM	Helium MFC set to  0.000000
4/28/2011	5:57:58 PM	H2 MFC set to  0.000000
4/28/2011	5:57:58 PM	BCl3 MFC set to  0.000000
4/28/2011	5:57:58 PM	PHl3 MFC set to  0.000000
4/28/2011	5:57:58 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:57:58 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:57:58 PM	Tube furnace set to 0
4/28/2011	5:58:58 PM	H2 valve closed
4/28/2011	5:58:58 PM	BCl3 valve closed
4/28/2011	5:58:58 PM	PH3 valve closed
4/28/2011	5:58:58 PM	SiCl4 pre valve closed
4/28/2011	5:58:58 PM	SiCl4 post valve closed
4/28/2011	5:58:58 PM	Bubbler valve closed
4/28/2011	5:58:58 PM	Helium valve opened
4/28/2011	5:58:58 PM	Main Vac valve opened
4/28/2011	5:58:58 PM	Bypass valve opened
4/28/2011	5:58:58 PM	Helium MFC set to  100.000000
4/28/2011	5:58:58 PM	H2 MFC set to  0.000000
4/28/2011	5:58:58 PM	BCl3 MFC set to  0.000000
4/28/2011	5:58:58 PM	PHl3 MFC set to  0.000000
4/28/2011	5:58:58 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:58:58 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:58:59 PM	Tube furnace set to 0
4/28/2011	5:59:59 PM	Helium valve closed
4/28/2011	5:59:59 PM	H2 valve closed
4/28/2011	5:59:59 PM	BCl3 valve closed
4/28/2011	5:59:59 PM	PH3 valve closed
4/28/2011	5:59:59 PM	SiCl4 pre valve closed
4/28/2011	5:59:59 PM	SiCl4 post valve closed
4/28/2011	5:59:59 PM	Bubbler valve closed
4/28/2011	5:59:59 PM	Main Vac valve opened
4/28/2011	5:59:59 PM	Bypass valve opened
4/28/2011	5:59:59 PM	Helium MFC set to  0.000000
4/28/2011	5:59:59 PM	H2 MFC set to  0.000000
4/28/2011	5:59:59 PM	BCl3 MFC set to  0.000000
4/28/2011	5:59:59 PM	PHl3 MFC set to  0.000000
4/28/2011	5:59:59 PM	SiCl4 MFC set to  0.000000
4/28/2011	5:59:59 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	5:59:59 PM	Tube furnace set to 0
4/28/2011	6:00:59 PM	H2 valve closed
4/28/2011	6:00:59 PM	BCl3 valve closed
4/28/2011	6:00:59 PM	PH3 valve closed
4/28/2011	6:00:59 PM	SiCl4 pre valve closed
4/28/2011	6:00:59 PM	SiCl4 post valve closed
4/28/2011	6:00:59 PM	Bubbler valve closed
4/28/2011	6:00:59 PM	Helium valve opened
4/28/2011	6:00:59 PM	Main Vac valve opened
4/28/2011	6:00:59 PM	Bypass valve opened
4/28/2011	6:00:59 PM	Helium MFC set to  100.000000
4/28/2011	6:00:59 PM	H2 MFC set to  0.000000
4/28/2011	6:00:59 PM	BCl3 MFC set to  0.000000
4/28/2011	6:00:59 PM	PHl3 MFC set to  0.000000
4/28/2011	6:00:59 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:00:59 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:00:59 PM	Tube furnace set to 0
4/28/2011	6:01:59 PM	Helium valve closed
4/28/2011	6:01:59 PM	H2 valve closed
4/28/2011	6:01:59 PM	BCl3 valve closed
4/28/2011	6:01:59 PM	PH3 valve closed
4/28/2011	6:01:59 PM	SiCl4 pre valve closed
4/28/2011	6:01:59 PM	SiCl4 post valve closed
4/28/2011	6:01:59 PM	Bubbler valve closed
4/28/2011	6:01:59 PM	Main Vac valve opened
4/28/2011	6:01:59 PM	Bypass valve opened
4/28/2011	6:01:59 PM	Helium MFC set to  0.000000
4/28/2011	6:01:59 PM	H2 MFC set to  0.000000
4/28/2011	6:01:59 PM	BCl3 MFC set to  0.000000
4/28/2011	6:01:59 PM	PHl3 MFC set to  0.000000
4/28/2011	6:01:59 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:01:59 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:01:59 PM	Tube furnace set to 0
4/28/2011	6:02:59 PM	H2 valve closed
4/28/2011	6:02:59 PM	BCl3 valve closed
4/28/2011	6:02:59 PM	PH3 valve closed
4/28/2011	6:02:59 PM	SiCl4 pre valve closed
4/28/2011	6:02:59 PM	SiCl4 post valve closed
4/28/2011	6:02:59 PM	Bubbler valve closed
4/28/2011	6:02:59 PM	Helium valve opened
4/28/2011	6:02:59 PM	Main Vac valve opened
4/28/2011	6:02:59 PM	Bypass valve opened
4/28/2011	6:02:59 PM	Helium MFC set to  100.000000
4/28/2011	6:02:59 PM	H2 MFC set to  0.000000
4/28/2011	6:02:59 PM	BCl3 MFC set to  0.000000
4/28/2011	6:02:59 PM	PHl3 MFC set to  0.000000
4/28/2011	6:02:59 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:02:59 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:02:59 PM	Tube furnace set to 0
4/28/2011	6:03:59 PM	Helium valve closed
4/28/2011	6:03:59 PM	H2 valve closed
4/28/2011	6:03:59 PM	BCl3 valve closed
4/28/2011	6:03:59 PM	PH3 valve closed
4/28/2011	6:03:59 PM	SiCl4 pre valve closed
4/28/2011	6:03:59 PM	SiCl4 post valve closed
4/28/2011	6:03:59 PM	Bubbler valve closed
4/28/2011	6:03:59 PM	Main Vac valve opened
4/28/2011	6:03:59 PM	Bypass valve opened
4/28/2011	6:03:59 PM	Helium MFC set to  0.000000
4/28/2011	6:03:59 PM	H2 MFC set to  0.000000
4/28/2011	6:03:59 PM	BCl3 MFC set to  0.000000
4/28/2011	6:03:59 PM	PHl3 MFC set to  0.000000
4/28/2011	6:03:59 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:03:59 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:04:00 PM	Tube furnace set to 0
4/28/2011	6:05:00 PM	H2 valve closed
4/28/2011	6:05:00 PM	BCl3 valve closed
4/28/2011	6:05:00 PM	PH3 valve closed
4/28/2011	6:05:00 PM	SiCl4 pre valve closed
4/28/2011	6:05:00 PM	SiCl4 post valve closed
4/28/2011	6:05:00 PM	Bubbler valve closed
4/28/2011	6:05:00 PM	Helium valve opened
4/28/2011	6:05:00 PM	Main Vac valve opened
4/28/2011	6:05:00 PM	Bypass valve opened
4/28/2011	6:05:00 PM	Helium MFC set to  100.000000
4/28/2011	6:05:00 PM	H2 MFC set to  0.000000
4/28/2011	6:05:00 PM	BCl3 MFC set to  0.000000
4/28/2011	6:05:00 PM	PHl3 MFC set to  0.000000
4/28/2011	6:05:00 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:05:00 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:05:00 PM	Tube furnace set to 0
4/28/2011	6:06:00 PM	Helium valve closed
4/28/2011	6:06:00 PM	H2 valve closed
4/28/2011	6:06:00 PM	BCl3 valve closed
4/28/2011	6:06:00 PM	PH3 valve closed
4/28/2011	6:06:00 PM	SiCl4 pre valve closed
4/28/2011	6:06:00 PM	SiCl4 post valve closed
4/28/2011	6:06:00 PM	Bubbler valve closed
4/28/2011	6:06:00 PM	Main Vac valve opened
4/28/2011	6:06:00 PM	Bypass valve opened
4/28/2011	6:06:00 PM	Helium MFC set to  0.000000
4/28/2011	6:06:00 PM	H2 MFC set to  0.000000
4/28/2011	6:06:00 PM	BCl3 MFC set to  0.000000
4/28/2011	6:06:00 PM	PHl3 MFC set to  0.000000
4/28/2011	6:06:00 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:06:00 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:06:00 PM	Tube furnace set to 0
4/28/2011	6:07:00 PM	H2 valve closed
4/28/2011	6:07:00 PM	BCl3 valve closed
4/28/2011	6:07:00 PM	PH3 valve closed
4/28/2011	6:07:00 PM	SiCl4 pre valve closed
4/28/2011	6:07:00 PM	SiCl4 post valve closed
4/28/2011	6:07:00 PM	Bubbler valve closed
4/28/2011	6:07:00 PM	Helium valve opened
4/28/2011	6:07:00 PM	Main Vac valve opened
4/28/2011	6:07:00 PM	Bypass valve opened
4/28/2011	6:07:00 PM	Helium MFC set to  100.000000
4/28/2011	6:07:00 PM	H2 MFC set to  0.000000
4/28/2011	6:07:00 PM	BCl3 MFC set to  0.000000
4/28/2011	6:07:00 PM	PHl3 MFC set to  0.000000
4/28/2011	6:07:00 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:07:00 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:07:00 PM	Tube furnace set to 0
4/28/2011	6:08:00 PM	Helium valve closed
4/28/2011	6:08:00 PM	H2 valve closed
4/28/2011	6:08:00 PM	BCl3 valve closed
4/28/2011	6:08:00 PM	PH3 valve closed
4/28/2011	6:08:00 PM	SiCl4 pre valve closed
4/28/2011	6:08:00 PM	SiCl4 post valve closed
4/28/2011	6:08:00 PM	Bubbler valve closed
4/28/2011	6:08:00 PM	Main Vac valve opened
4/28/2011	6:08:00 PM	Bypass valve opened
4/28/2011	6:08:00 PM	Helium MFC set to  0.000000
4/28/2011	6:08:00 PM	H2 MFC set to  0.000000
4/28/2011	6:08:00 PM	BCl3 MFC set to  0.000000
4/28/2011	6:08:00 PM	PHl3 MFC set to  0.000000
4/28/2011	6:08:00 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:08:00 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:08:00 PM	Tube furnace set to 0
4/28/2011	6:09:00 PM	H2 valve closed
4/28/2011	6:09:00 PM	BCl3 valve closed
4/28/2011	6:09:00 PM	PH3 valve closed
4/28/2011	6:09:00 PM	SiCl4 pre valve closed
4/28/2011	6:09:00 PM	SiCl4 post valve closed
4/28/2011	6:09:00 PM	Bubbler valve closed
4/28/2011	6:09:00 PM	Helium valve opened
4/28/2011	6:09:00 PM	Main Vac valve opened
4/28/2011	6:09:00 PM	Bypass valve opened
4/28/2011	6:09:00 PM	Helium MFC set to  100.000000
4/28/2011	6:09:00 PM	H2 MFC set to  0.000000
4/28/2011	6:09:00 PM	BCl3 MFC set to  0.000000
4/28/2011	6:09:00 PM	PHl3 MFC set to  0.000000
4/28/2011	6:09:00 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:09:00 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:09:01 PM	Tube furnace set to 0
4/28/2011	6:10:01 PM	Helium valve closed
4/28/2011	6:10:01 PM	H2 valve closed
4/28/2011	6:10:01 PM	BCl3 valve closed
4/28/2011	6:10:01 PM	PH3 valve closed
4/28/2011	6:10:01 PM	SiCl4 pre valve closed
4/28/2011	6:10:01 PM	SiCl4 post valve closed
4/28/2011	6:10:01 PM	Bubbler valve closed
4/28/2011	6:10:01 PM	Main Vac valve opened
4/28/2011	6:10:01 PM	Bypass valve opened
4/28/2011	6:10:01 PM	Helium MFC set to  0.000000
4/28/2011	6:10:01 PM	H2 MFC set to  0.000000
4/28/2011	6:10:01 PM	BCl3 MFC set to  0.000000
4/28/2011	6:10:01 PM	PHl3 MFC set to  0.000000
4/28/2011	6:10:01 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:10:01 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:10:01 PM	Tube furnace set to 0
4/28/2011	6:11:01 PM	H2 valve closed
4/28/2011	6:11:01 PM	BCl3 valve closed
4/28/2011	6:11:01 PM	PH3 valve closed
4/28/2011	6:11:01 PM	SiCl4 pre valve closed
4/28/2011	6:11:01 PM	SiCl4 post valve closed
4/28/2011	6:11:01 PM	Bubbler valve closed
4/28/2011	6:11:01 PM	Helium valve opened
4/28/2011	6:11:01 PM	Main Vac valve opened
4/28/2011	6:11:01 PM	Bypass valve opened
4/28/2011	6:11:01 PM	Helium MFC set to  100.000000
4/28/2011	6:11:01 PM	H2 MFC set to  0.000000
4/28/2011	6:11:01 PM	BCl3 MFC set to  0.000000
4/28/2011	6:11:01 PM	PHl3 MFC set to  0.000000
4/28/2011	6:11:01 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:11:01 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:11:01 PM	Tube furnace set to 0
4/28/2011	6:12:01 PM	Helium valve closed
4/28/2011	6:12:01 PM	H2 valve closed
4/28/2011	6:12:01 PM	BCl3 valve closed
4/28/2011	6:12:01 PM	PH3 valve closed
4/28/2011	6:12:01 PM	SiCl4 pre valve closed
4/28/2011	6:12:01 PM	SiCl4 post valve closed
4/28/2011	6:12:01 PM	Bubbler valve closed
4/28/2011	6:12:01 PM	Main Vac valve opened
4/28/2011	6:12:01 PM	Bypass valve opened
4/28/2011	6:12:01 PM	Helium MFC set to  0.000000
4/28/2011	6:12:01 PM	H2 MFC set to  0.000000
4/28/2011	6:12:01 PM	BCl3 MFC set to  0.000000
4/28/2011	6:12:01 PM	PHl3 MFC set to  0.000000
4/28/2011	6:12:01 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:12:01 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:12:01 PM	Tube furnace set to 0
4/28/2011	6:12:02 PM	Run finished at 6:12 PM
4/28/2011	6:12:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/28/2011	6:29:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/28/2011	6:29:54 PM	Recipe started at 6:29 PM
4/28/2011	6:29:54 PM	Helium valve closed
4/28/2011	6:29:54 PM	H2 valve closed
4/28/2011	6:29:54 PM	BCl3 valve closed
4/28/2011	6:29:54 PM	PH3 valve closed
4/28/2011	6:29:54 PM	SiCl4 pre valve closed
4/28/2011	6:29:54 PM	SiCl4 post valve closed
4/28/2011	6:29:54 PM	Main Vac valve closed
4/28/2011	6:29:54 PM	Bypass valve closed
4/28/2011	6:29:54 PM	Bubbler valve closed
4/28/2011	6:29:54 PM	Helium MFC set to  0.000000
4/28/2011	6:29:54 PM	H2 MFC set to  0.000000
4/28/2011	6:29:54 PM	BCl3 MFC set to  0.000000
4/28/2011	6:29:54 PM	PHl3 MFC set to  0.000000
4/28/2011	6:29:54 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:29:54 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:29:54 PM	Tube furnace set to 0
4/28/2011	6:29:54 PM	Run finished at 6:29 PM
4/28/2011	6:29:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/28/2011	6:30:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	6:30:18 PM	Recipe started at 6:30 PM
4/28/2011	6:30:18 PM	Helium valve closed
4/28/2011	6:30:18 PM	H2 valve closed
4/28/2011	6:30:18 PM	BCl3 valve closed
4/28/2011	6:30:18 PM	PH3 valve closed
4/28/2011	6:30:18 PM	SiCl4 pre valve closed
4/28/2011	6:30:18 PM	SiCl4 post valve closed
4/28/2011	6:30:18 PM	Main Vac valve closed
4/28/2011	6:30:18 PM	Bubbler valve closed
4/28/2011	6:30:18 PM	Bypass valve opened
4/28/2011	6:30:18 PM	Helium MFC set to  0.000000
4/28/2011	6:30:18 PM	H2 MFC set to  0.000000
4/28/2011	6:30:18 PM	BCl3 MFC set to  0.000000
4/28/2011	6:30:18 PM	PHl3 MFC set to  0.000000
4/28/2011	6:30:18 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:30:18 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:30:18 PM	Tube furnace set to 0
4/28/2011	6:30:18 PM	Helium valve closed
4/28/2011	6:30:18 PM	H2 valve closed
4/28/2011	6:30:18 PM	BCl3 valve closed
4/28/2011	6:30:19 PM	PH3 valve closed
4/28/2011	6:30:19 PM	SiCl4 pre valve closed
4/28/2011	6:30:19 PM	SiCl4 post valve closed
4/28/2011	6:30:19 PM	Bubbler valve closed
4/28/2011	6:30:19 PM	Main Vac valve opened
4/28/2011	6:30:19 PM	Bypass valve opened
4/28/2011	6:30:19 PM	Helium MFC set to  0.000000
4/28/2011	6:30:19 PM	H2 MFC set to  0.000000
4/28/2011	6:30:19 PM	BCl3 MFC set to  0.000000
4/28/2011	6:30:19 PM	PHl3 MFC set to  0.000000
4/28/2011	6:30:19 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:30:19 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:30:19 PM	Tube furnace set to 0
4/28/2011	6:30:19 PM	Run finished at 6:30 PM
4/28/2011	6:30:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	6:32:27 PM	Recipe started at 6:32 PM
4/28/2011	6:32:27 PM	Helium valve closed
4/28/2011	6:32:27 PM	BCl3 valve closed
4/28/2011	6:32:27 PM	PH3 valve closed
4/28/2011	6:32:27 PM	SiCl4 pre valve closed
4/28/2011	6:32:27 PM	SiCl4 post valve closed
4/28/2011	6:32:27 PM	Main Vac valve closed
4/28/2011	6:32:27 PM	Bypass valve closed
4/28/2011	6:32:27 PM	Bubbler valve closed
4/28/2011	6:32:27 PM	H2 valve opened
4/28/2011	6:32:27 PM	Helium MFC set to  0.000000
4/28/2011	6:32:27 PM	H2 MFC set to  500.000000
4/28/2011	6:32:27 PM	BCl3 MFC set to  0.000000
4/28/2011	6:32:27 PM	PHl3 MFC set to  0.000000
4/28/2011	6:32:27 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:32:27 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:32:27 PM	Tube furnace set to 100
4/28/2011	6:33:46 PM	Helium valve closed
4/28/2011	6:33:46 PM	BCl3 valve closed
4/28/2011	6:33:46 PM	PH3 valve closed
4/28/2011	6:33:46 PM	SiCl4 pre valve closed
4/28/2011	6:33:46 PM	SiCl4 post valve closed
4/28/2011	6:33:46 PM	Main Vac valve closed
4/28/2011	6:33:46 PM	Bypass valve closed
4/28/2011	6:33:46 PM	H2 valve opened
4/28/2011	6:33:46 PM	Bubbler valve opened
4/28/2011	6:33:46 PM	Helium MFC set to  0.000000
4/28/2011	6:33:46 PM	H2 MFC set to  500.000000
4/28/2011	6:33:46 PM	BCl3 MFC set to  0.000000
4/28/2011	6:33:46 PM	PHl3 MFC set to  0.000000
4/28/2011	6:33:46 PM	SiCl4 MFC set to  0.000000
4/28/2011	6:33:46 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:33:46 PM	Tube furnace set to 1000
4/28/2011	6:53:46 PM	Helium valve closed
4/28/2011	6:53:46 PM	PH3 valve closed
4/28/2011	6:53:46 PM	Main Vac valve closed
4/28/2011	6:53:46 PM	Bypass valve closed
4/28/2011	6:53:46 PM	H2 valve opened
4/28/2011	6:53:46 PM	BCl3 valve opened
4/28/2011	6:53:46 PM	SiCl4 pre valve opened
4/28/2011	6:53:46 PM	SiCl4 post valve opened
4/28/2011	6:53:46 PM	Bubbler valve opened
4/28/2011	6:53:46 PM	Helium MFC set to  0.000000
4/28/2011	6:53:46 PM	H2 MFC set to  500.000000
4/28/2011	6:53:46 PM	BCl3 MFC set to  3.000000
4/28/2011	6:53:46 PM	PHl3 MFC set to  0.000000
4/28/2011	6:53:46 PM	SiCl4 MFC set to  50.000000
4/28/2011	6:53:46 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	6:53:47 PM	Tube furnace set to 1000
4/28/2011	7:10:27 PM	H2 valve closed
4/28/2011	7:10:27 PM	BCl3 valve closed
4/28/2011	7:10:27 PM	PH3 valve closed
4/28/2011	7:10:27 PM	SiCl4 pre valve closed
4/28/2011	7:10:27 PM	SiCl4 post valve closed
4/28/2011	7:10:27 PM	Main Vac valve closed
4/28/2011	7:10:27 PM	Bypass valve closed
4/28/2011	7:10:27 PM	Helium valve opened
4/28/2011	7:10:27 PM	Bubbler valve opened
4/28/2011	7:10:27 PM	Helium MFC set to  500.000000
4/28/2011	7:10:27 PM	H2 MFC set to  0.000000
4/28/2011	7:10:27 PM	BCl3 MFC set to  0.000000
4/28/2011	7:10:27 PM	PHl3 MFC set to  0.000000
4/28/2011	7:10:27 PM	SiCl4 MFC set to  0.000000
4/28/2011	7:10:27 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	7:10:27 PM	Tube furnace set to 0
4/28/2011	7:30:27 PM	Helium valve closed
4/28/2011	7:30:27 PM	H2 valve closed
4/28/2011	7:30:27 PM	BCl3 valve closed
4/28/2011	7:30:27 PM	PH3 valve closed
4/28/2011	7:30:27 PM	SiCl4 pre valve closed
4/28/2011	7:30:27 PM	SiCl4 post valve closed
4/28/2011	7:30:27 PM	Main Vac valve closed
4/28/2011	7:30:27 PM	Bypass valve closed
4/28/2011	7:30:27 PM	Bubbler valve closed
4/28/2011	7:30:27 PM	Helium MFC set to  0.000000
4/28/2011	7:30:27 PM	H2 MFC set to  0.000000
4/28/2011	7:30:27 PM	BCl3 MFC set to  0.000000
4/28/2011	7:30:27 PM	PHl3 MFC set to  0.000000
4/28/2011	7:30:27 PM	SiCl4 MFC set to  0.000000
4/28/2011	7:30:27 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	7:30:27 PM	Tube furnace set to 0
4/28/2011	7:30:27 PM	Run finished at 7:30 PM
4/28/2011	9:09:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/28/2011	9:09:11 PM	Recipe started at 9:09 PM
4/28/2011	9:09:11 PM	H2 valve closed
4/28/2011	9:09:11 PM	BCl3 valve closed
4/28/2011	9:09:11 PM	PH3 valve closed
4/28/2011	9:09:11 PM	SiCl4 pre valve closed
4/28/2011	9:09:11 PM	SiCl4 post valve closed
4/28/2011	9:09:11 PM	Main Vac valve closed
4/28/2011	9:09:11 PM	Bypass valve closed
4/28/2011	9:09:11 PM	Bubbler valve closed
4/28/2011	9:09:11 PM	Helium valve opened
4/28/2011	9:09:11 PM	Helium MFC set to  500.000000
4/28/2011	9:09:11 PM	H2 MFC set to  0.000000
4/28/2011	9:09:11 PM	BCl3 MFC set to  0.000000
4/28/2011	9:09:11 PM	PHl3 MFC set to  0.000000
4/28/2011	9:09:11 PM	SiCl4 MFC set to  0.000000
4/28/2011	9:09:11 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	9:09:12 PM	Tube furnace set to 0
4/28/2011	9:09:17 PM	Helium valve closed
4/28/2011	9:09:17 PM	H2 valve closed
4/28/2011	9:09:17 PM	BCl3 valve closed
4/28/2011	9:09:17 PM	PH3 valve closed
4/28/2011	9:09:17 PM	SiCl4 pre valve closed
4/28/2011	9:09:17 PM	SiCl4 post valve closed
4/28/2011	9:09:17 PM	Main Vac valve closed
4/28/2011	9:09:17 PM	Bypass valve closed
4/28/2011	9:09:17 PM	Bubbler valve closed
4/28/2011	9:09:17 PM	Helium MFC set to  0.000000
4/28/2011	9:09:17 PM	H2 MFC set to  0.000000
4/28/2011	9:09:17 PM	BCl3 MFC set to  0.000000
4/28/2011	9:09:17 PM	PHl3 MFC set to  0.000000
4/28/2011	9:09:17 PM	SiCl4 MFC set to  0.000000
4/28/2011	9:09:17 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	9:09:17 PM	Tube furnace set to 0
4/28/2011	9:09:17 PM	Run finished at 9:09 PM
4/28/2011	9:09:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/28/2011	9:18:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	9:18:18 PM	Recipe started at 9:18 PM
4/28/2011	9:18:18 PM	Helium valve closed
4/28/2011	9:18:18 PM	H2 valve closed
4/28/2011	9:18:18 PM	BCl3 valve closed
4/28/2011	9:18:18 PM	PH3 valve closed
4/28/2011	9:18:18 PM	SiCl4 pre valve closed
4/28/2011	9:18:18 PM	SiCl4 post valve closed
4/28/2011	9:18:18 PM	Main Vac valve closed
4/28/2011	9:18:18 PM	Bubbler valve closed
4/28/2011	9:18:18 PM	Bypass valve opened
4/28/2011	9:18:18 PM	Helium MFC set to  0.000000
4/28/2011	9:18:18 PM	H2 MFC set to  0.000000
4/28/2011	9:18:18 PM	BCl3 MFC set to  0.000000
4/28/2011	9:18:18 PM	PHl3 MFC set to  0.000000
4/28/2011	9:18:18 PM	SiCl4 MFC set to  0.000000
4/28/2011	9:18:18 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	9:18:18 PM	Tube furnace set to 0
4/28/2011	9:18:51 PM	Helium valve closed
4/28/2011	9:18:51 PM	H2 valve closed
4/28/2011	9:18:51 PM	BCl3 valve closed
4/28/2011	9:18:51 PM	PH3 valve closed
4/28/2011	9:18:51 PM	SiCl4 pre valve closed
4/28/2011	9:18:51 PM	SiCl4 post valve closed
4/28/2011	9:18:51 PM	Bubbler valve closed
4/28/2011	9:18:51 PM	Main Vac valve opened
4/28/2011	9:18:51 PM	Bypass valve opened
4/28/2011	9:18:51 PM	Helium MFC set to  0.000000
4/28/2011	9:18:51 PM	H2 MFC set to  0.000000
4/28/2011	9:18:51 PM	BCl3 MFC set to  0.000000
4/28/2011	9:18:51 PM	PHl3 MFC set to  0.000000
4/28/2011	9:18:51 PM	SiCl4 MFC set to  0.000000
4/28/2011	9:18:51 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	9:18:51 PM	Tube furnace set to 0
4/28/2011	9:18:51 PM	Run finished at 9:18 PM
4/28/2011	9:18:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	9:25:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/28/2011	9:25:34 PM	Recipe started at 9:25 PM
4/28/2011	9:25:34 PM	Helium valve closed
4/28/2011	9:25:34 PM	H2 valve closed
4/28/2011	9:25:34 PM	BCl3 valve closed
4/28/2011	9:25:34 PM	PH3 valve closed
4/28/2011	9:25:34 PM	SiCl4 pre valve closed
4/28/2011	9:25:34 PM	SiCl4 post valve closed
4/28/2011	9:25:34 PM	Main Vac valve closed
4/28/2011	9:25:34 PM	Bypass valve closed
4/28/2011	9:25:34 PM	Bubbler valve closed
4/28/2011	9:25:34 PM	Helium MFC set to  0.000000
4/28/2011	9:25:34 PM	H2 MFC set to  0.000000
4/28/2011	9:25:34 PM	BCl3 MFC set to  0.000000
4/28/2011	9:25:34 PM	PHl3 MFC set to  0.000000
4/28/2011	9:25:34 PM	SiCl4 MFC set to  0.000000
4/28/2011	9:25:34 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	9:25:34 PM	Tube furnace set to 0
4/28/2011	9:25:34 PM	Run finished at 9:25 PM
4/28/2011	9:25:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/28/2011	9:25:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	9:25:57 PM	Recipe started at 9:25 PM
4/28/2011	9:25:57 PM	Helium valve closed
4/28/2011	9:25:57 PM	H2 valve closed
4/28/2011	9:25:57 PM	BCl3 valve closed
4/28/2011	9:25:57 PM	PH3 valve closed
4/28/2011	9:25:57 PM	SiCl4 pre valve closed
4/28/2011	9:25:57 PM	SiCl4 post valve closed
4/28/2011	9:25:57 PM	Main Vac valve closed
4/28/2011	9:25:57 PM	Bubbler valve closed
4/28/2011	9:25:57 PM	Bypass valve opened
4/28/2011	9:25:57 PM	Helium MFC set to  0.000000
4/28/2011	9:25:57 PM	H2 MFC set to  0.000000
4/28/2011	9:25:57 PM	BCl3 MFC set to  0.000000
4/28/2011	9:25:57 PM	PHl3 MFC set to  0.000000
4/28/2011	9:25:57 PM	SiCl4 MFC set to  0.000000
4/28/2011	9:25:57 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	9:25:57 PM	Tube furnace set to 0
4/28/2011	9:25:57 PM	Helium valve closed
4/28/2011	9:25:57 PM	H2 valve closed
4/28/2011	9:25:57 PM	BCl3 valve closed
4/28/2011	9:25:57 PM	PH3 valve closed
4/28/2011	9:25:57 PM	SiCl4 pre valve closed
4/28/2011	9:25:57 PM	SiCl4 post valve closed
4/28/2011	9:25:57 PM	Bubbler valve closed
4/28/2011	9:25:57 PM	Main Vac valve opened
4/28/2011	9:25:57 PM	Bypass valve opened
4/28/2011	9:25:57 PM	Helium MFC set to  0.000000
4/28/2011	9:25:57 PM	H2 MFC set to  0.000000
4/28/2011	9:25:57 PM	BCl3 MFC set to  0.000000
4/28/2011	9:25:57 PM	PHl3 MFC set to  0.000000
4/28/2011	9:25:57 PM	SiCl4 MFC set to  0.000000
4/28/2011	9:25:57 PM	Bypass solenoid MFC set to  0.000000
4/28/2011	9:25:57 PM	Tube furnace set to 0
4/28/2011	9:25:58 PM	Run finished at 9:25 PM
4/28/2011	9:25:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/28/2011	9:26:03 PM	Tube furnace set to 10
